发明申请
- 专利标题: SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- 专利标题(中): 基板处理装置和基板处理方法
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申请号: US13237408申请日: 2011-09-20
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公开(公告)号: US20120073609A1公开(公告)日: 2012-03-29
- 发明人: Koji HASHIMOTO , Kazuki Nakamura , Takahiro Yamaguchi
- 申请人: Koji HASHIMOTO , Kazuki Nakamura , Takahiro Yamaguchi
- 优先权: JP2010-219048 20100929
- 主分类号: B08B3/00
- IPC分类号: B08B3/00
摘要:
A substrate treatment apparatus includes: a nozzle having an opposing surface to be opposed to and spaced from a front surface of a substrate rotated by a substrate rotating unit, the nozzle further having an outlet port provided in the opposing surface to be opposed to a rotation center of the substrate; a second liquid supply control unit which controls the second liquid supplying unit to fill a space defined between the front surface and the opposing surface with the second liquid in a liquid filled state, and then stop supplying the second liquid to form a liquid puddle in the space; and a first liquid supply control unit which controls a first liquid supplying unit to spout a first liquid from the outlet port after the formation of the liquid puddle.
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