发明申请
- 专利标题: USE OF CONTACTS TO CREATE DIFFERENTIAL STRESSES ON DEVICES
- 专利标题(中): 使用联系人创建设备上的差别应力
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申请号: US12892465申请日: 2010-09-28
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公开(公告)号: US20120074501A1公开(公告)日: 2012-03-29
- 发明人: John J. Ellis-Monaghan , Jeffrey P. Gambino , Kirk D. Peterson , Jed H. Rankin , Robert R. Robison
- 申请人: John J. Ellis-Monaghan , Jeffrey P. Gambino , Kirk D. Peterson , Jed H. Rankin , Robert R. Robison
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/8238
摘要:
Disclosed herein are various methods and structures using contacts to create differential stresses on devices in an integrated circuit (IC) chip. An IC chip is disclosed having a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET), a PFET contact to a source/drain region of the PFET and an NFET contact to a source/drain region of the NFET. In a first embodiment, a silicon germanium (SiGe) layer is included only under the PFET contact, between the PFET contact and the source/drain region of the PFET. In a second embodiment, either the PFET contact extends into the source/drain region of the PFET or the NFET contact extends into the source/drain region of the NFET.
公开/授权文献
- US08460981B2 Use of contacts to create differential stresses on devices 公开/授权日:2013-06-11
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