发明申请
- 专利标题: INTERFEROMETRIC OPTICAL DISPLAY SYSTEM WITH BROADBAND CHARACTERISTICS
- 专利标题(中): 具有宽带特性的光纤显示系统
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申请号: US13314448申请日: 2011-12-08
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公开(公告)号: US20120075313A1公开(公告)日: 2012-03-29
- 发明人: Evgeni Gousev , Gang Xu , Marek Mienko
- 申请人: Evgeni Gousev , Gang Xu , Marek Mienko
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: G06T1/00
- IPC分类号: G06T1/00 ; B05D5/06 ; B05D5/12 ; G02B26/00
摘要:
Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.