发明申请
US20120080605A1 DETECTION APPARATUS AND RADIATION DETECTION SYSTEM 审中-公开
检测装置和辐射检测系统

DETECTION APPARATUS AND RADIATION DETECTION SYSTEM
摘要:
A stacked-type detection apparatus includes a plurality of pixels arranged at small intervals in row and column directions and has small signal line capacitance that allows a high-speed driving operation. Each pixel includes a conversion element configured to convert radiation or light into an electric charge and a switch element disposed on an insulating substrate. A driving line is disposed on the insulating substrate and is connected to switch elements arranged in the row direction; and a signal line is connected to switch elements arranged in the column direction. Each conversion element is disposed above a corresponding switch element. The driving line is realized using a conductive layer embedded in an insulating layer located below an uppermost surface portion of the driving line located below an uppermost surface portion of a main electrode of the switch element located below the conversion element.
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