发明申请
- 专利标题: DETECTION APPARATUS AND RADIATION DETECTION SYSTEM
- 专利标题(中): 检测装置和辐射检测系统
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申请号: US13231167申请日: 2011-09-13
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公开(公告)号: US20120080605A1公开(公告)日: 2012-04-05
- 发明人: Jun Kawanabe , Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Kentaro Fujiyoshi , Hiroshi Wayama
- 申请人: Jun Kawanabe , Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Kentaro Fujiyoshi , Hiroshi Wayama
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-222588 20100930
- 主分类号: G01T1/24
- IPC分类号: G01T1/24
摘要:
A stacked-type detection apparatus includes a plurality of pixels arranged at small intervals in row and column directions and has small signal line capacitance that allows a high-speed driving operation. Each pixel includes a conversion element configured to convert radiation or light into an electric charge and a switch element disposed on an insulating substrate. A driving line is disposed on the insulating substrate and is connected to switch elements arranged in the row direction; and a signal line is connected to switch elements arranged in the column direction. Each conversion element is disposed above a corresponding switch element. The driving line is realized using a conductive layer embedded in an insulating layer located below an uppermost surface portion of the driving line located below an uppermost surface portion of a main electrode of the switch element located below the conversion element.
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