公开(公告)号：US08405039B2

公开(公告)日：2013-03-26

申请号：US13231189

申请日：2011-09-13

申请人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Takamasa Ishii ,  Jun Kawanabe ,  Hiroshi Wayama

发明人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Takamasa Ishii ,  Jun Kawanabe ,  Hiroshi Wayama

IPC分类号： G01T1/24 ,  G01T1/20

CPC分类号： G01T1/247 ,  G01T1/24 ,  H01L27/14663 ,  H04N5/32

摘要： A stacked-type detection apparatus includes a plurality of pixels arranged in a matrix having row and column directions. Each pixel includes a conversion element configured to convert radiation or light into an electric charge, and a switch element configured to output an electric signal corresponding to the electric charge. A driving line is connected to switch elements arranged in the row direction, and a signal line is connected to switch elements arranged in the column direction. In each pixel, the conversion element is disposed above the switch element. The signal line is formed by a conductive layer embedded in an insulating layer located below an uppermost surface portion of a main electrode of the switch element located below an uppermost surface portion of the driving line located below the conversion element.

摘要翻译： 层叠型检测装置包括排列成具有列和列方向的矩阵的多个像素。 每个像素包括被配置为将辐射或光转换为电荷的转换元件，以及被配置为输出对应于电荷的电信号的开关元件。 驱动线连接到沿行方向布置的开关元件，并且信号线连接到沿列方向布置的开关元件。 在每个像素中，转换元件设置在开关元件上方。 信号线由位于位于位于转换元件下方的驱动线的最上表面下方的开关元件的主电极的最上表面部分下方的绝缘层中的导电层形成。

公开(公告)号：US20130020494A1

公开(公告)日：2013-01-24

申请号：US13544105

申请日：2012-07-09

申请人： Masato Ofuji ,  Chiori Mochizuki ,  Minoru Watanabe ,  Keigo Yokoyama ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

发明人： Masato Ofuji ,  Chiori Mochizuki ,  Minoru Watanabe ,  Keigo Yokoyama ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

IPC分类号： H01L27/146

CPC分类号： H04N5/3765 ,  H01L27/14609 ,  H01L27/14663 ,  H01L27/14692 ,  H04N5/32

摘要： A detection apparatus includes a driving circuit unit in which a plurality of unit circuits each including a first circuit that supplies conducting voltage of a switch element of a pixel based on voltage included in a clock signal to a driving wire in accordance with an initiation signal and a second circuit that supplies non-conducting voltage of the switch element to the driving wire in accordance with a termination signal are provided for the plurality of corresponding driving wires and a control unit that supplies the clock signal to the driving circuit unit. The control unit supplies control voltage to the plurality of unit circuits, and each of the plurality of unit circuits further includes a third circuit that continues to supply the non-conducting voltage to the corresponding driving wire in accordance with the control voltage.

摘要翻译： 检测装置包括驱动电路单元，其中多个单元电路各自包括第一电路，该第一电路根据启动信号将基于时钟信号中包含的电压的像素的开关元件的导通电压提供给驱动线， 为多个相应的驱动线提供了根据终止信号将开关元件的非导通电压提供给驱动线的第二电路，以及将时钟信号提供给驱动电路单元的控制单元。 控制单元向多个单元电路提供控制电压，并且多个单元电路中的每一个还包括第三电路，其继续根据控制电压向相应的驱动线提供非导通电压。

公开(公告)号：US20120080600A1

公开(公告)日：2012-04-05

申请号：US13231189

申请日：2011-09-13

申请人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Takamasa Ishii ,  Jun Kawanabe ,  Hiroshi Wayama

发明人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Takamasa Ishii ,  Jun Kawanabe ,  Hiroshi Wayama

IPC分类号： G01T1/20

CPC分类号： G01T1/247 ,  G01T1/24 ,  H01L27/14663 ,  H04N5/32

摘要： A stacked-type detection apparatus includes a plurality of pixels arranged in a matrix having row and column directions. Each pixel includes a conversion element configured to convert radiation or light into an electric charge, and a switch element configured to output an electric signal corresponding to the electric charge. A driving line is connected to switch elements arranged in the row direction, and a signal line is connected to switch elements arranged in the column direction. In each pixel, the conversion element is disposed above the switch element. The signal line is formed by a conductive layer embedded in an insulating layer located below an uppermost surface portion of a main electrode of the switch element located below an uppermost surface portion of the driving line located below the conversion element.

摘要翻译： 层叠型检测装置包括排列成具有列和列方向的矩阵的多个像素。 每个像素包括被配置为将辐射或光转换为电荷的转换元件，以及被配置为输出对应于电荷的电信号的开关元件。 驱动线连接到沿行方向布置的开关元件，并且信号线连接到沿列方向布置的开关元件。 在每个像素中，转换元件设置在开关元件上方。 信号线由位于位于位于转换元件下方的驱动线的最上表面下方的开关元件的主电极的最上表面部分下方的绝缘层中的导电层形成。

公开(公告)号：US09190437B2

公开(公告)日：2015-11-17

申请号：US13610472

申请日：2012-09-11

申请人： Jun Kawanabe ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

发明人： Jun Kawanabe ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

IPC分类号： H01J40/14 ,  H01L27/146

CPC分类号： H01L27/14609 ,  H01L27/14665

摘要： A detection apparatus includes a transistor disposed on a substrate, a conversion element disposed above the transistor and connected to the transistor, a capacitor connected in parallel with conversion element to the transistor, the capacitor including, between the substrate and the conversion element, an ohmic contact part connected to the conversion element, a semiconductor part connected to the ohmic contact part, and an electrically conductive part disposed at a location opposite to the semiconductor part and the ohmic contact part via an insulating layer, and a potential supplying unit configured to selectively supply a first electric potential to the electrically conductive part to accumulate charge carriers in the semiconductor part and a second electric potential to the electrically conductive part to deplete the semiconductor part. The detection apparatus configured in the above-described manner is capable of controlling pixel capacitance thereby achieving a high signal-to-noise ratio.

摘要翻译： 检测装置包括设置在基板上的晶体管，设置在晶体管上方并连接到晶体管的转换元件，与转换元件并联连接到晶体管的电容器，电容器包括在基板和转换元件之间的欧姆 连接到转换元件的接触部分，连接到欧姆接触部分的半导体部分和经由绝缘层设置在与半导体部分和欧姆接触部分相对的位置处的导电部分，以及电位供给单元，被配置为选择性地 向导电部分提供第一电位，以将半导体部件中的电荷载流子积累，并且向导电部件累积第二电位以耗尽半导体部件。 以上述方式配置的检测装置能够控制像素电容，从而实现高的信噪比。

公开(公告)号：US20120306041A1

公开(公告)日：2012-12-06

申请号：US13477401

申请日：2012-05-22

申请人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Jun Kawanabe ,  Hiroshi Wayama

发明人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Jun Kawanabe ,  Hiroshi Wayama

IPC分类号： H01L31/0224

CPC分类号： H01L27/1461 ,  H01L27/1462 ,  H01L27/14676 ,  H01L27/14685 ,  H01L27/14692

摘要： In a method of manufacturing a detection device including pixels on a substrate, each pixel including a switch element and a conversion element including an impurity semiconductor layer on an electrode, which is disposed above the switch element and isolated per pixel, the switch element and the electrode being connected in a contact hole formed in a protection layer and an interlayer insulating layer, which are disposed between the switch elements and the electrodes, the method includes forming insulating members over the interlayer insulating layer between the electrodes in contact with the interlayer insulating layer, forming an impurity semiconductor film covering the insulating members and the electrodes, and forming a coating layer covering an area of the protection layer where an orthographically-projected image of a portion of the electrode is positioned, the portion including a level difference within the contact hole.

摘要翻译： 在制造包括衬底上的像素的检测装置的方法中，每个像素包括开关元件和包括电极上的杂质半导体层的转换元件，该电容器设置在开关元件上方并且每像素隔离开关元件和 电极被连接在形成在保护层和层间绝缘层中的接触孔中，所述接触孔设置在开关元件和电极之间，该方法包括在与层间绝缘层接触的电极之间的层间绝缘层上形成绝缘构件 形成覆盖所述绝缘构件和所述电极的杂质半导体膜，以及形成覆盖所述电极的一部分的正投影像的所述保护层的区域的覆盖层，所述部分包括所述触点内的电平差 孔。

公开(公告)号：US20120305785A1

公开(公告)日：2012-12-06

申请号：US13477472

申请日：2012-05-22

申请人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Jun Kawanabe ,  Hiroshi Wayama

发明人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Jun Kawanabe ,  Hiroshi Wayama

IPC分类号： G01T1/24 ,  H01L27/14 ,  H01L31/18

CPC分类号： H01L27/14687 ,  H01L27/14609 ,  H01L27/1463 ,  H01L27/14676

摘要： In a method of manufacturing a detection device including a plurality of pixels arrayed on a substrate, the pixels each including a switch element and a conversion element including an impurity semiconductor layer disposed on an electrode, which is disposed above the switch element, which is isolated per pixel, and which is made of a transparent conductive oxide joined to the switch element, and further including an interlayer insulating layer, which is made of an organic material, which is disposed between the switch elements and the electrodes, and which covers the switch elements, the method includes insulating members each made of an inorganic material and disposed to cover the interlayer insulating layer between adjacent two of the electrodes in contact with the interlayer insulating layer, and forming an impurity semiconductor film covering the insulating members and the electrodes and becoming the impurity semiconductor layer.

摘要翻译： 在制造包括排列在基板上的多个像素的检测装置的方法中，每个像素包括开关元件和转换元件，转换元件包括设置在开关元件上方的电极上的杂质半导体层，该杂质半导体层被隔离 并且由连接到开关元件的透明导电氧化物制成，并且还包括设置在开关元件和电极之间的由有机材料制成并且覆盖开关的层间绝缘层 元件，该方法包括各自由无机材料制成的绝缘构件，并设置成覆盖与层间绝缘层接触的相邻的两个电极之间的层间绝缘层，并且形成覆盖绝缘构件和电极的杂质半导体膜，并成为 杂质半导体层。

公开(公告)号：US20120126126A1

公开(公告)日：2012-05-24

申请号：US13296105

申请日：2011-11-14

申请人： Keigo Yokoyama ,  Chiori Mochizuki ,  Minoru Watanabe ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

发明人： Keigo Yokoyama ,  Chiori Mochizuki ,  Minoru Watanabe ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

IPC分类号： G01T1/208 ,  G01T1/20

CPC分类号： G01T1/2928 ,  H01L27/14618 ,  H01L27/14632 ,  H01L27/14663 ,  H01L27/14676 ,  H01L2924/0002 ,  H01L2924/00

摘要： A radiation detection apparatus includes a scintillator configured to convert incident radiation into visible light, a photoelectric conversion unit and an electrically conductive member. The photoelectric conversion unit includes a two-dimensional array of pixels arranged on a substrate. Each pixel is configured to convert the visible light into an electric signal. The electrically conductive member is supplied with a fixed potential. The electrically conductive member, the substrate, the photoelectric conversion unit, and the scintillator are disposed in this order from the radiation-incident side of the radiation detection apparatus to the opposite side.

摘要翻译： 辐射检测装置包括被配置为将入射的辐射转换成可见光的闪烁体，光电转换单元和导电构件。 光电转换单元包括布置在基板上的二维像素阵列。 每个像素被配置为将可见光转换成电信号。 导电构件被提供固定电位。 导电构件，基板，光电转换单元和闪烁体以从放射线检测装置的辐射入射侧到相对侧的顺序设置。

公开(公告)号：US20120126095A1

公开(公告)日：2012-05-24

申请号：US13295536

申请日：2011-11-14

申请人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

发明人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

IPC分类号： H01L27/14 ,  H01L31/0224

CPC分类号： H01L27/14658 ,  H01L27/14663 ,  H01L31/02322 ,  H01L31/105 ,  H01L31/119

摘要： A detection apparatus includes conversion elements and switch elements disposed below the conversion elements; insulating layers are disposed between the conversion elements and switch elements. Each conversion element includes a first electrode corresponding to a switch element. A second electrode extends over the plurality of conversion elements; and a semiconductor layer formed between the first electrodes and the second electrode extends over the plurality of conversion elements. Insulating layers include first regions located immediately below the first electrodes and a second region located between the first regions. A third electrode is disposed in the second region and between the insulating layers. The third electrode is supplied with a potential that sets a potential of a part where the second region is in contact with the semiconductor layer to a value between a potential of the second electrode and a potential of the first electrode.

摘要翻译： 检测装置包括设置在转换元件下方的转换元件和开关元件; 绝缘层设置在转换元件和开关元件之间。 每个转换元件包括对应于开关元件的第一电极。 第二电极在多个转换元件上延伸; 并且形成在所述第一电极和所述第二电极之间的半导体层在所述多个转换元件上延伸。 绝缘层包括位于第一电极正下方的第一区域和位于第一区域之间的第二区域。 第三电极设置在第二区域和绝缘层之间。 第三电极被提供有将第二区域与半导体层接触的部分的电位设定为第二电极的电位和第一电极的电位之间的值的电位。

公开(公告)号：US08866093B2

公开(公告)日：2014-10-21

申请号：US13477472

申请日：2012-05-22

申请人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Jun Kawanabe ,  Hiroshi Wayama

发明人： Kentaro Fujiyoshi ,  Chiori Mochizuki ,  Minoru Watanabe ,  Masato Ofuji ,  Keigo Yokoyama ,  Jun Kawanabe ,  Hiroshi Wayama

IPC分类号： G01T1/24 ,  H01L27/146

CPC分类号： H01L27/14687 ,  H01L27/14609 ,  H01L27/1463 ,  H01L27/14676

摘要： In a method of manufacturing a detection device including a plurality of pixels arrayed on a substrate, the pixels each including a switch element and a conversion element including an impurity semiconductor layer disposed on an electrode, which is disposed above the switch element, which is isolated per pixel, and which is made of a transparent conductive oxide joined to the switch element, and further including an interlayer insulating layer, which is made of an organic material, which is disposed between the switch elements and the electrodes, and which covers the switch elements, the method includes insulating members each made of an inorganic material and disposed to cover the interlayer insulating layer between adjacent two of the electrodes in contact with the interlayer insulating layer, and forming an impurity semiconductor film covering the insulating members and the electrodes and becoming the impurity semiconductor layer.

摘要翻译： 在制造包括排列在基板上的多个像素的检测装置的方法中，每个像素包括开关元件和转换元件，转换元件包括设置在开关元件上方的电极上的杂质半导体层，该杂质半导体层被隔离 并且由连接到开关元件的透明导电氧化物制成，并且还包括设置在开关元件和电极之间的由有机材料制成并且覆盖开关的层间绝缘层 元件，该方法包括各自由无机材料制成的绝缘构件，并设置成覆盖与层间绝缘层接触的相邻的两个电极之间的层间绝缘层，并且形成覆盖绝缘构件和电极的杂质半导体膜，并成为 杂质半导体层。

公开(公告)号：US08759785B2

公开(公告)日：2014-06-24

申请号：US13195535

申请日：2011-08-01

申请人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

发明人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

IPC分类号： G01T1/24

CPC分类号： G01T1/242 ,  G01T1/24 ,  H01L27/14636 ,  H01L27/14663 ,  H01L31/113 ,  H04N5/32

摘要： A stacked-type detection apparatus including a plurality of pixels arranged at small intervals is configured to have low capacitance associated with signal lines and/or driving lines. With this novel configuration, small time constant and high-speed driving capability can be achieved in the signal lines and/or driving lines. The plurality of pixels in the detection apparatus are arranged in a row direction and a column direction on an insulating substrate. Each pixel includes a conversion element and a switch element, the conversion element is disposed above the switch element. A driving line disposed below the conversion elements is connected to switch elements arranged in the row direction, and a signal line is connected to switch elements arranged in the column direction. The signal line includes a conductive layer embedded in an insulating member, the insulating member is disposed in a layer lower than an uppermost surface portion of the driving line.

摘要翻译： 包括以小间隔排列的多个像素的层叠型检测装置被配置为具有与信号线和/或驱动线相关联的低电容。 利用这种新颖的结构，可以在信号线路和/或驱动线路中实现小的时间常数和高速驱动能力。 检测装置中的多个像素在绝缘基板上排列成行方向和列方向。 每个像素包括转换元件和开关元件，转换元件设置在开关元件上方。 设置在转换元件下方的驱动线连接到沿行方向布置的开关元件，并且信号线连接到沿列方向布置的开关元件。 信号线包括嵌入在绝缘构件中的导电层，绝缘构件设置在比驱动线的最上表面部分低的层中。