发明申请
US20120080794A1 METHOD FOR PRODUCING A METALLIZATION HAVING TWO MULTIPLE ALTERNATING METALLIZATION LAYERS FOR AT LEAST ONE CONTACT PAD AND SEMICONDUCTOR WAFER HAVING SAID METALLIZATION FOR AT LEAST ONE CONTACT PAD
有权
用于生产具有两个多个替代金属化层的金属化方法,用于至少一个接触垫和半导体层,具有用于至少一个接触垫的均匀金属化
- 专利标题: METHOD FOR PRODUCING A METALLIZATION HAVING TWO MULTIPLE ALTERNATING METALLIZATION LAYERS FOR AT LEAST ONE CONTACT PAD AND SEMICONDUCTOR WAFER HAVING SAID METALLIZATION FOR AT LEAST ONE CONTACT PAD
- 专利标题(中): 用于生产具有两个多个替代金属化层的金属化方法,用于至少一个接触垫和半导体层,具有用于至少一个接触垫的均匀金属化
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申请号: US13257346申请日: 2010-03-18
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公开(公告)号: US20120080794A1公开(公告)日: 2012-04-05
- 发明人: Victor Sidorov , Rimma Zhytnytska , Joachim Wuerfl
- 申请人: Victor Sidorov , Rimma Zhytnytska , Joachim Wuerfl
- 申请人地址: DE Rudower Chaussee 17
- 专利权人: FORSCHUNGSVERBUND BERLIN E.V.
- 当前专利权人: FORSCHUNGSVERBUND BERLIN E.V.
- 当前专利权人地址: DE Rudower Chaussee 17
- 优先权: DE102009013921.4 20090319
- 国际申请: PCT/EP2001/053553 WO 20100318
- 主分类号: H01L23/532
- IPC分类号: H01L23/532 ; H01L21/768
摘要:
The invention relates to a method for producing a metallization for at least one contact pad and a semiconductor wafer having metallization for at least one contact pad. The invention relates to a metallization (and a semiconductor wafer having corresponding metallization) and to a method for the production thereof that first of all can be produced by means of physical gas phase separation (dry separation) and secondly ensures sufficient adhesion of a lot bump. The method for producing a metallization (40) for at least one contact pad (20) according to the invention comprises the following process steps: applying at least one contact pad (20) to a substrate (10), applying a barrier layer (30) to the top side of the at least one contact pad (20) and applying a metallization (40) to the top side of the barrier layer (30), characterized in that the barrier layer (30) and the metallization (40) are applied by means of physical separation and that the metallization (40) is designed as a layer structure having two multiple alternating metallization layers (41, 42), wherein the first metallization layer (41) is made of nickel or an Ni alloy having a layer thickness of less than 500 nm and the second metallization layer (42) is made of a material that is different than nickel and is electrically conductive.
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