Invention Application
US20120085281A1 APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATMENT OF SUBSTRATES
审中-公开
具有多个加热系统的装置，用于基板的在线热处理
- Patent Title: APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATMENT OF SUBSTRATES
- Patent Title (中): 具有多个加热系统的装置，用于基板的在线热处理
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Application No.: US13267456Application Date: 2011-10-06
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Publication No.: US20120085281A1Publication Date: 2012-04-12
- Inventor: Aubrey L. HELMS, JR. , Kevin B. Peck , James T. Johnson , Pontus K.H. Nilsson , Reese Reynolds
- Applicant: Aubrey L. HELMS, JR. , Kevin B. Peck , James T. Johnson , Pontus K.H. Nilsson , Reese Reynolds
- Applicant Address: US CA Sonora
- Assignee: Sandvik Thermal Process, Inc.
- Current Assignee: Sandvik Thermal Process, Inc.
- Current Assignee Address: US CA Sonora
- Main IPC: B05C9/14
- IPC: B05C9/14 ; F27D3/00
Abstract:
The present invention relates to in-line equipment used to process substrates. In some applications, the equipment is used in the in-line manufacture PV cells or modules. In some embodiments, a heating system is provided that comprises a plurality of heating technologies for the heat treatment of substrates wherein a first heating system is used to rapidly raise the substrate temperature to the desired set point and a second heating system is used to maintain the substrate at the temperature set point throughout the thermal treatment process.
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