摘要:
The present invention relates to in-line equipment used to process substrates. In some applications, the equipment is used in the in-line manufacture PV cells or modules. In some embodiments, a heating system is provided that comprises a plurality of heating technologies for the heat treatment of substrates wherein a first heating system is used to rapidly raise the substrate temperature to the desired set point and a second heating system is used to maintain the substrate at the temperature set point throughout the thermal treatment process.
摘要:
The present invention provides a heat treating process chamber having a housing with a flow passage in communication with a vestibule assembly. The vestibule assembly includes an outer ring with a first groove and an inner ring with a second groove. The first groove is formed in an axially inwardly facing surface of the outer ring. The first groove has a portion open in a radially outer direction and an axially inner direction. The second groove opens in an axially inner direction and is formed in an axially outwardly facing surface of the inner ring. The first and second grooves form a passageway when they are in an axially superimposed relationship. The first groove forms a radially outwardly open end and the second groove forms an axially inwardly facing end of the passageway. The passageway communicates with the flow passage thereby allowing passage of a temperature adjusting medium.
摘要:
A method for monitoring the condition of an electric current-carrying heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof may be embedded within a microcontroller for increased portability and functionality.
摘要翻译:一种用于监视载流加热元件的状态的方法,包括将加热元件安装在一个位置,并将材料的初始组成C i i i N在初始时间T i SUB>对应于所述加热元件的安装。 然后在安装的位置的随后的时间T s之后收集反映加热元件材料的后续组成C'S的数据,并且加热元件的材料组成的任何变化 在T< I>和T SUB之间进行监视。 当变化达到指示可能的故障条件的阈值时发送报警。 根据一个实施例,提供阻抗监视器,其计算并比较所需精度水平处的阻抗以确定材料组成的变化。 阻抗监视器或其部分可以嵌入在微控制器内以增加便携性和功能性。
摘要:
The present invention provides a furnace which heat treats substrates. The furnace includes a heating section and working components. The heating section includes heating coils having spacers disposed within the heating coils where a mass of the heating coils and a mass of the spacers contributes to a mass of the heating section. The working components include a processing chamber and a transport mechanism. The processing chambers facilitates passage of a substrate through the heating section. The transport mechanism transports the substrate through the heating section and into the exit assembly. The heating section mass exceeds a combined mass of the processing chamber, the transport mechanism and the substrate within the heating section.
摘要:
Methods to determine an instantaneous resistance value of an electric circuit and a measurement system to determine an instantaneous resistance value of an electric circuit are disclosed. Exemplary embodiments of the method measure an in-situ instantaneous voltage of the circuit and an in-situ instantaneous current of the circuit and calculate the instantaneous resistance. Optional temperature measurement can be included in the method and the calculated instantaneous resistance related to the measured temperature. The method can be applied to phase angle fired loads and to zero-cross (time proportioned) loads.
摘要:
A method for monitoring the condition of a heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof can be embedded within a microcontroller for increased portability and functionality.
摘要翻译:一种用于监测加热元件的状态的方法,包括将加热元件安装在位置,并将材料的初始组成C i i i i i在初始时间T i i / SUB>对应于加热元件的所述安装。 然后在安装的位置的随后的时间T s之后收集反映加热元件材料的后续组成C'S的数据,并且加热元件的材料组成的任何变化 在T< I>和T SUB之间进行监视。 当变化达到指示可能的故障条件的阈值时发送报警。 根据一个实施例,提供阻抗监视器,其计算并比较所需精度水平处的阻抗以确定材料组成的变化。 阻抗监视器或其部分可以嵌入在微控制器内以增加便携性和功能性。
摘要:
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.
摘要:
Spacer for a vertical support structure of a heating element coil includes a mating feature including complimentary components on first opposing sides of the spacer, a cavity, open to second opposing sides of the spacer, and an extension offset from an axis intersecting the mating features, the extension including a pocket sized to fit an individual loop of the heating element coil. The spacer can be incorporated into a support structure for a heating element coil interlocking adjacent loops of the coil so that they are retained in a collinear and concentric arrangement while allowing the loops of the coil to move freely inward and outward from the central axis in unison.
摘要:
A forced fluid switch including a first plenum in communication with a first port; a second plenum in communication with a second port; a third plenum in switched communication with the first plenum and the second plenum and in communication with a third port; a fourth plenum in switched communication with the first plenum and the second plenum and in communication with a fourth port; and wherein the forced fluid switch has at least a first forced fluid path and a second forced fluid path, wherein in the first forced fluid path, the third plenum is in communication with the first plenum and the fourth plenum is in communication with the second plenum, and wherein in the second forced fluid path, the third plenum is in communication with the second plenum and the fourth plenum is in communication with the first plenum. A method is provided for switching forced fluid.
摘要:
Methods to determine an instantaneous resistance value of an electric circuit and a measurement system to determine an instantaneous resistance value of an electric circuit are disclosed. Exemplary embodiments of the method measure an in-situ instantaneous voltage of the circuit and an in-situ instantaneous current of the circuit and calculate the instantaneous resistance. Optional temperature measurement can be included in the method and the calculated instantaneous resistance related to the measured temperature. The method can be applied to phase angle fired loads and to zero-cross (time proportioned) loads.