Vestibule assembly for a heat treatment furnace
    2.
    发明授权
    Vestibule assembly for a heat treatment furnace 有权
    用于热处理炉的前庭组件

    公开(公告)号:US07293986B2

    公开(公告)日:2007-11-13

    申请号:US10429834

    申请日:2003-05-06

    IPC分类号: F27D15/02

    摘要: The present invention provides a heat treating process chamber having a housing with a flow passage in communication with a vestibule assembly. The vestibule assembly includes an outer ring with a first groove and an inner ring with a second groove. The first groove is formed in an axially inwardly facing surface of the outer ring. The first groove has a portion open in a radially outer direction and an axially inner direction. The second groove opens in an axially inner direction and is formed in an axially outwardly facing surface of the inner ring. The first and second grooves form a passageway when they are in an axially superimposed relationship. The first groove forms a radially outwardly open end and the second groove forms an axially inwardly facing end of the passageway. The passageway communicates with the flow passage thereby allowing passage of a temperature adjusting medium.

    摘要翻译: 本发明提供一种具有壳体的热处理处理室,该壳体具有与前庭组件连通的流动通道。 前庭组件包括具有第一凹槽的外环和具有第二凹槽的内环。 第一槽形成在外环的轴向向内的表面中。 第一凹槽具有在径向外侧方向和轴向内部方向上敞开的部分。 第二凹槽在轴向内部方向上开口并且形成在内圈的轴向向外的表面中。 当它们处于轴向重叠的关系中时,第一和第二槽形成通道。 第一凹槽形成径向向外开口的端部,第二凹槽形成通道的轴向向内的端部。 通道与流路连通,从而允许温度调节介质通过。

    Heating element condition monitor
    3.
    发明授权
    Heating element condition monitor 有权
    加热元件状态监控

    公开(公告)号:US06956489B2

    公开(公告)日:2005-10-18

    申请号:US10196160

    申请日:2002-07-17

    IPC分类号: G01N17/00 H05B1/02 G08B21/00

    摘要: A method for monitoring the condition of an electric current-carrying heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof may be embedded within a microcontroller for increased portability and functionality.

    摘要翻译: 一种用于监视载流加热元件的状态的方法,包括将加热元件安装在一个位置,并将材料的初始组成C i i i N在初始时间T i 对应于所述加热元件的安装。 然后在安装的位置的随后的时间T s之后收集反映加热元件材料的后续组成C'S的数据,并且加热元件的材料组成的任何变化 在T< I>和T SUB之间进行监视。 当变化达到指示可能的故障条件的阈值时发送报警。 根据一个实施例,提供阻抗监视器,其计算并比较所需精度水平处的阻抗以确定材料组成的变化。 阻抗监视器或其部分可以嵌入在微控制器内以增加便携性和功能性。

    Continuous process furnace
    4.
    发明授权
    Continuous process furnace 有权
    连续加工炉

    公开(公告)号:US06512206B1

    公开(公告)日:2003-01-28

    申请号:US10032444

    申请日:2002-01-02

    IPC分类号: F27D1100

    摘要: The present invention provides a furnace which heat treats substrates. The furnace includes a heating section and working components. The heating section includes heating coils having spacers disposed within the heating coils where a mass of the heating coils and a mass of the spacers contributes to a mass of the heating section. The working components include a processing chamber and a transport mechanism. The processing chambers facilitates passage of a substrate through the heating section. The transport mechanism transports the substrate through the heating section and into the exit assembly. The heating section mass exceeds a combined mass of the processing chamber, the transport mechanism and the substrate within the heating section.

    摘要翻译: 本发明提供一种热处理基板的炉。 该炉包括加热部分和工作部件。 加热部分包括具有设置在加热线圈内的间隔物的加热线圈,其中加热线圈的质量和间隔物的质量贡献于加热部分的质量。 工作部件包括处理室和输送机构。 处理室便于衬底通过加热部分。 输送机构将基板输送通过加热部分并进入出口组件。 加热部质量超过加热部内的处理室,输送机构和基板的组合质量。

    High accuracy in-situ resistance measurements methods
    5.
    发明申请
    High accuracy in-situ resistance measurements methods 有权
    高精度原位电阻测量方法

    公开(公告)号:US20070290692A1

    公开(公告)日:2007-12-20

    申请号:US11454922

    申请日:2006-06-19

    IPC分类号: G01R31/08

    CPC分类号: G01R27/08

    摘要: Methods to determine an instantaneous resistance value of an electric circuit and a measurement system to determine an instantaneous resistance value of an electric circuit are disclosed. Exemplary embodiments of the method measure an in-situ instantaneous voltage of the circuit and an in-situ instantaneous current of the circuit and calculate the instantaneous resistance. Optional temperature measurement can be included in the method and the calculated instantaneous resistance related to the measured temperature. The method can be applied to phase angle fired loads and to zero-cross (time proportioned) loads.

    摘要翻译: 公开了确定电路的瞬时电阻值和确定电路的瞬时电阻值的测量系统的方法。 该方法的示例性实施例测量电路的原位瞬时电压和电路的原位瞬时电流并计算瞬时电阻。 方法中可以包括可选的温度测量和与测量温度相关的计算的瞬时电阻。 该方法可应用于相角点火负载和零交叉(时间成比例)负载。

    Heating element condition monitor
    6.
    发明授权
    Heating element condition monitor 有权
    加热元件状态监控

    公开(公告)号:US07012538B2

    公开(公告)日:2006-03-14

    申请号:US10619561

    申请日:2003-07-16

    IPC分类号: B60Q1/00

    摘要: A method for monitoring the condition of a heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof can be embedded within a microcontroller for increased portability and functionality.

    摘要翻译: 一种用于监测加热元件的状态的方法,包括将加热元件安装在位置,并将材料的初始组成C i i i i i在初始时间T i i / SUB>对应于加热元件的所述安装。 然后在安装的位置的随后的时间T s之后收集反映加热元件材料的后续组成C'S的数据,并且加热元件的材料组成的任何变化 在T< I>和T SUB之间进行监视。 当变化达到指示可能的故障条件的阈值时发送报警。 根据一个实施例,提供阻抗监视器,其计算并比较所需精度水平处的阻抗以确定材料组成的变化。 阻抗监视器或其部分可以嵌入在微控制器内以增加便携性和功能性。

    Support structure for heating element coil
    8.
    发明授权
    Support structure for heating element coil 有权
    加热元件线圈的支撑结构

    公开(公告)号:US08785825B2

    公开(公告)日:2014-07-22

    申请号:US13168662

    申请日:2011-06-24

    申请人: Kevin B. Peck

    发明人: Kevin B. Peck

    IPC分类号: H05B3/06 H05B3/66

    CPC分类号: H05B3/66

    摘要: Spacer for a vertical support structure of a heating element coil includes a mating feature including complimentary components on first opposing sides of the spacer, a cavity, open to second opposing sides of the spacer, and an extension offset from an axis intersecting the mating features, the extension including a pocket sized to fit an individual loop of the heating element coil. The spacer can be incorporated into a support structure for a heating element coil interlocking adjacent loops of the coil so that they are retained in a collinear and concentric arrangement while allowing the loops of the coil to move freely inward and outward from the central axis in unison.

    摘要翻译: 用于加热元件线圈的垂直支撑结构的间隔件包括配合特征,其包括在间隔件的第一相对侧上的互补部件,间隔开口至第二相对侧的腔,以及从与配合特征相交的轴线的延伸部偏移, 所述延伸部包括尺寸适合于加热元件线圈的单独回路的口袋。 间隔件可以结合到用于使线圈的相邻环互锁的加热元件线圈的支撑结构中,使得它们保持在共线和同心配置中,同时允许线圈的环从中心轴线一致地自由地向内和向外移动 。

    Forced-fluid switch
    9.
    发明授权
    Forced-fluid switch 有权
    强制流体开关

    公开(公告)号:US08539974B2

    公开(公告)日:2013-09-24

    申请号:US13084968

    申请日:2011-04-12

    申请人: Kevin B. Peck

    发明人: Kevin B. Peck

    IPC分类号: F16K49/00 F28F27/02

    摘要: A forced fluid switch including a first plenum in communication with a first port; a second plenum in communication with a second port; a third plenum in switched communication with the first plenum and the second plenum and in communication with a third port; a fourth plenum in switched communication with the first plenum and the second plenum and in communication with a fourth port; and wherein the forced fluid switch has at least a first forced fluid path and a second forced fluid path, wherein in the first forced fluid path, the third plenum is in communication with the first plenum and the fourth plenum is in communication with the second plenum, and wherein in the second forced fluid path, the third plenum is in communication with the second plenum and the fourth plenum is in communication with the first plenum. A method is provided for switching forced fluid.

    摘要翻译: 强制流体开关,包括与第一端口连通的第一增压室; 与第二个港口通信的第二次全会; 第三次全会与第一次全会和第二次全会交换沟通,并与第三个港口通信; 第四次全会与第一次全会和第二次全会交换沟通,并与第四个港口通信; 并且其中所述强制流体开关具有至少第一强制流体路径和第二强制流体路径,其中在所述第一强制流体路径中,所述第三压力通道与所述第一增压室连通,并且所述第四增压室与所述第二增压室连通 ,并且其中在所述第二强制流体路径中,所述第三集气室与所述第二增压室连通,并且所述第四增压室与所述第一增压室连通。 提供了一种用于切换强制流体的方法。

    High accuracy in-situ resistance measurements methods
    10.
    发明授权
    High accuracy in-situ resistance measurements methods 有权
    高精度原位电阻测量方法

    公开(公告)号:US07825672B2

    公开(公告)日:2010-11-02

    申请号:US11454922

    申请日:2006-06-19

    IPC分类号: G01R27/08 G01R31/08

    CPC分类号: G01R27/08

    摘要: Methods to determine an instantaneous resistance value of an electric circuit and a measurement system to determine an instantaneous resistance value of an electric circuit are disclosed. Exemplary embodiments of the method measure an in-situ instantaneous voltage of the circuit and an in-situ instantaneous current of the circuit and calculate the instantaneous resistance. Optional temperature measurement can be included in the method and the calculated instantaneous resistance related to the measured temperature. The method can be applied to phase angle fired loads and to zero-cross (time proportioned) loads.

    摘要翻译: 公开了确定电路的瞬时电阻值和确定电路的瞬时电阻值的测量系统的方法。 该方法的示例性实施例测量电路的原位瞬时电压和电路的原位瞬时电流并计算瞬时电阻。 方法中可以包括可选的温度测量和与测量温度相关的计算的瞬时电阻。 该方法可应用于相角点火负载和零交叉(时间成比例)负载。