发明申请
- 专利标题: MICROMECHANICAL RESONATOR
- 专利标题(中): 微生物共振器
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申请号: US13284196申请日: 2011-10-28
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公开(公告)号: US20120091854A1公开(公告)日: 2012-04-19
- 发明人: Ville KAAJAKARI
- 申请人: Ville KAAJAKARI
- 申请人地址: FI VANTAA
- 专利权人: VTI TECHNOLOGIES OY
- 当前专利权人: VTI TECHNOLOGIES OY
- 当前专利权人地址: FI VANTAA
- 主分类号: H02N1/00
- IPC分类号: H02N1/00
摘要:
The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.
公开/授权文献
- US08334736B2 Micromechanical resonator 公开/授权日:2012-12-18