公开(公告)号：US20120091854A1

公开(公告)日：2012-04-19

申请号：US13284196

申请日：2011-10-28

申请人： Ville KAAJAKARI

发明人： Ville KAAJAKARI

IPC分类号： H02N1/00

CPC分类号： H03H9/2463 ,  H02N1/008 ,  H03H3/0076 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2478 ,  H03H9/2484 ,  H03H2009/02299

摘要： The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.

摘要翻译： 本发明涉及微机械谐振器的设计，更确切地说，涉及微机电系统（MEMS）谐振器的设计。 本发明提供了一种用于包括可移动质量结构和弹簧结构的微机电系统（MEMS）谐振器的改进的设计结构。 弹簧结构包括弹簧元件。 弹簧元件从一端锚定并在另一端连接到多个电极指。 多个电极指在弹簧元件的另一端可操作地连接在一起。 改进的结构对于制造变化是稳定的，并且具有良好性能的可靠的频率参考，特别是在小尺寸解决方案中。