发明申请
US20120092746A1 OSCILLATOR-AMPLIFIER DRIVE LASER WITH SEED PROTECTION FOR AN EUV LIGHT SOURCE
有权
振荡放大器驱动激光器,具有针对EUV光源的保护
- 专利标题: OSCILLATOR-AMPLIFIER DRIVE LASER WITH SEED PROTECTION FOR AN EUV LIGHT SOURCE
- 专利标题(中): 振荡放大器驱动激光器,具有针对EUV光源的保护
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申请号: US13077757申请日: 2011-03-31
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公开(公告)号: US20120092746A1公开(公告)日: 2012-04-19
- 发明人: Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J.W. Brown , Igor V. Fomenkov
- 申请人: Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J.W. Brown , Igor V. Fomenkov
- 申请人地址: US CA San Diego
- 专利权人: CYMER, INC.
- 当前专利权人: CYMER, INC.
- 当前专利权人地址: US CA San Diego
- 主分类号: G02F1/11
- IPC分类号: G02F1/11 ; H01S3/00
摘要:
As disclosed herein, in a first aspect, a device may comprise: an oscillator producing a light output on a beam path; a target material for interaction with light on the beam path at an irradiation site; a beam delay on the beam path the beam delay having a beam folding optical arrangement; and a switch positioned along the beam path and interposed between the oscillator and the beam delay; the switch closable to divert at least a portion of light on the beam path from the beam path, the switch having close time, t1 and the beam path having a length, L1, along the path from the switch to the irradiation site; with t1
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