公开(公告)号：US20150083898A1

公开(公告)日：2015-03-26

申请号：US14037817

申请日：2013-09-26

申请人： Cymer, Inc.

发明人： Vahan Senekerimyan ,  Martijn Wehrens

IPC分类号： H05G2/00

CPC分类号： H05G2/008 ,  H05G2/006

摘要： A method and apparatus for improved control of the trajectory and timing of droplets of target material in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. A droplet illumination module generates two laser curtains for detecting the droplets. The first curtain is used for detecting the position of the droplets relative to a desired trajectory to the irradiation site so that the position of a droplet generator may be adjusted to direct the droplets to the irradiation site, as in the prior art. A droplet detection module detects each droplet as it passes through the second curtain, determines when the source laser should generate a pulse so that the pulse arrives at the irradiation site at the same time as the droplet, and sends a signal to the source laser to fire at the correct time.

摘要翻译： 公开了一种用于改善对激光产生的等离子体（UVP）极紫外（EUV）光系统中的目标材料液滴的轨迹和定时的控制的方法和装置。 液滴照明模块产生用于检测液滴的两个激光幕。 第一幕用于检测液滴相对于照射位置的期望轨迹的位置，使得可以调节液滴发生器的位置以将液滴引导到照射位置，如现有技术中那样。 液滴检测模块在通过第二帘幕时检测每个液滴，确定源激光器何时产生脉冲，使得脉冲在与液滴同时到达照射位置，并将信号发送到源激光器 在正确的时间点火。

公开(公告)号：US08681427B2

公开(公告)日：2014-03-25

申请号：US13535148

申请日：2012-06-27

申请人： Robert A. Bergstedt ,  Christopher Paul Pate ,  Jason Michael Arcand

发明人： Robert A. Bergstedt ,  Christopher Paul Pate ,  Jason Michael Arcand

IPC分类号： G02B27/14

CPC分类号： G02B27/145 ,  G02B26/0816 ,  G02B27/1006 ,  G02B27/141 ,  G03F7/70033 ,  H05G2/005 ,  H05G2/008

摘要： A dichroic beam splitter module is disclosed for separating a main pulse laser beam from a pre-pulse laser beam each traversing a common beam path. In one embodiment, two dichroic elements are physically aligned along the beam path and are configured to pass the pre-pulse, a laser light having a first wavelength, to target material located near an irradiation site yet reflect the main pulse, a laser light having a second wavelength. The reflected main pulse is then further reflected by two reflective elements or mirrors from the first dichroic element to the second dichroic element and then on to the irradiation site. In alternative embodiments, the first mirror is deformable to alter beam characteristics of the reflected main pulse beam and the second mirror is adjustable to align the main pulse beam to the irradiation site.

摘要翻译： 公开了用于将主脉冲激光束与每个穿过公共光束路径的预脉冲激光束分离的二向色光束分离器模块。 在一个实施例中，两个二向色元件沿着光束路径物理对齐，并且被配置为使具有第一波长的激光具有预脉冲，以将位于辐射位置附近的目标材料反射到主脉冲，激光具有 第二波长。 反射的主脉冲然后被两个反射元件或反射镜从第一二向色元件进一步反射到第二二向色元件，然后到照射部位。 在替代实施例中，第一镜可变形以改变反射的主脉冲光束的光束特性，并且第二反射镜是可调节的，以将主脉冲光束对准照射部位。

公开(公告)号：US20120298838A1

公开(公告)日：2012-11-29

申请号：US13571129

申请日：2012-08-09

申请人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

发明人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

IPC分类号： G01J1/16

CPC分类号： B23K26/043 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/0738 ,  C30B1/023 ,  C30B13/24

摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.

摘要翻译： 公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。 该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。 在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。 在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。 在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。

公开(公告)号：US20120292527A1

公开(公告)日：2012-11-22

申请号：US13112784

申请日：2011-05-20

申请人： Igor V. Fomenkov ,  William N. Partlo ,  Georgiy O. Vaschenko ,  William Oldham

发明人： Igor V. Fomenkov ,  William N. Partlo ,  Georgiy O. Vaschenko ,  William Oldham

IPC分类号： H05H1/46

CPC分类号： B01D29/56 ,  B22F3/105 ,  H05G2/006 ,  H05G2/008 ,  H05H1/46

摘要： A filter is used in a target material supply apparatus and includes a sheet having a first flat surface and a second opposing flat surface, and a plurality of through holes. The first flat surface is in fluid communication with a reservoir that holds a target mixture that includes a target material and non-target particles. The through holes extend from the second flat surface and are fluidly coupled at the second flat surface to an orifice of a nozzle. The sheet has a surface area that is exposed to the target mixture, the exposed surface area being at least a factor of one hundred less than an exposed surface area of a sintered filter having an equivalent transverse extent to that of the sheet.

摘要翻译： 在目标材料供给装置中使用过滤器，并且包括具有第一平面和第二相对平坦面的片，以及多个通孔。 第一平坦表面与储存包含目标材料和非目标颗粒的目标混合物的储存器流体连通。 通孔从第二平坦表面延伸并且在第二平坦表面处流体耦合到喷嘴的孔口。 片材具有暴露于目标混合物的表面积，暴露的表面积比具有与片材相当的横向程度的烧结过滤器的暴露表面积至少要低一百倍。

公开(公告)号：US08284815B2

公开(公告)日：2012-10-09

申请号：US12577077

申请日：2009-10-09

申请人： Hong Ye ,  Alex Ershov ,  Rajasekhar Rao ,  Daniel Brown ,  Slava Rokitski ,  Rong (Lauren) Liu ,  Ray Cybulski ,  James J. Ferrell ,  Robert Bergstedt ,  John Viatella ,  Thomas Duffey

发明人： Hong Ye ,  Alex Ershov ,  Rajasekhar Rao ,  Daniel Brown ,  Slava Rokitski ,  Rong (Lauren) Liu ,  Ray Cybulski ,  James J. Ferrell ,  Robert Bergstedt ,  John Viatella ,  Thomas Duffey

IPC分类号： H01S3/08 ,  G02B5/04

CPC分类号： G02B5/04 ,  G02B5/12 ,  H01S3/0057 ,  H01S3/0346 ,  H01S3/081 ,  H01S3/225

摘要： An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.

摘要翻译： 所公开的主题的一个方面包括减少由以下至少之一组成的光束反向棱镜的激光吸收的方法：增加第一入射点和倒角之间的第一距离，其中第一入射点在 在棱镜的第一反射面和第二反射面之间形成棱镜的第一反射面和倒角，其中倒角具有倒角面; 增加第二入射点和倒角之间的第二距离，其中第二入射点在棱镜的第二反射表面上; 并且增加棱镜倒角的倒角表面的反射率。 还公开了一种确定光学部件的主切割的方法。 还公开了包括至少一个初级切割光学部件的激光器。

公开(公告)号：US20120235066A1

公开(公告)日：2012-09-20

申请号：US13050198

申请日：2011-03-17

申请人： Alexander I. Ershov

发明人： Alexander I. Ershov

IPC分类号： G01J3/10 ,  H05B31/02

CPC分类号： H05G2/008 ,  G03F7/70025 ,  G03F7/70033 ,  G03F7/70983 ,  H01S3/10061 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2383 ,  H05G2/003 ,  H05G2/005

摘要： An EUV light source is disclosed herein which may comprise a droplet generator producing a stream of target material droplets, a first optical gain medium amplifying light on a first beam path without a seed laser providing a seed laser output to the first beam path, a second optical gain medium amplifying light on a second beam path without a seed laser providing a seed laser output to the second beam path, and a beam combiner combining light from the first beam path and the second beam path for interaction with a target material droplet to produce EUV light emitting plasma.

摘要翻译： 本文公开了一种EUV光源，其可以包括产生目标材料液滴流的液滴发生器，第一光学增益介质，在第一光束路径上放大光，而没有提供种子激光器输出到第一光束路径的种子激光器，第二光学增益介质 光学增益介质，在第二光束路径上放大光，而没有提供种子激光器输出到第二光束路径的种子激光器;以及光束组合器，其组合来自第一光束路径和第二光束路径的光，以与靶材料液滴相互作用 EUV发光等离子体。

公开(公告)号：US20120170112A1

公开(公告)日：2012-07-05

申请号：US12980939

申请日：2010-12-29

申请人： Richard L. Sandstrom

发明人： Richard L. Sandstrom

IPC分类号： H01S3/081 ,  G02B5/10 ,  H01S3/086 ,  G02B5/08

CPC分类号： G02B17/004 ,  G02B7/1815 ,  G02B7/1825 ,  H01S3/076 ,  H01S3/2325

摘要： An apparatus includes a first plurality of concave reflecting surfaces; a second plurality of reflecting surfaces facing the first plurality of concave reflecting surfaces such that a region is defined between the first and second pluralities; and an input for an optical beam to enter the region and an output for the optical beam to exit the region. The first and second pluralities of reflecting surfaces are arranged relative to each other so that the optical beam is re-imaged at a reflecting surface of one of the pluralities after only one reflection from a reflecting surface of the other of the pluralities and so that overlap of two or more optical beams on each of the reflecting surfaces is avoided.

摘要翻译： 一种装置包括：第一多个凹面反射面; 面对所述第一多个凹反射表面的第二多个反射表面，使得在所述第一和第二多个之间限定区域; 以及用于进入该区域的光束的输入和用于使光束离开该区域的输出。 第一和第二多个反射表面相对于彼此布置，使得光束在仅一次反射之后的多个反射表面中从多个另一个的反射表面重新成像，并且重叠 避免了在每个反射表面上的两个或更多个光束。

公开(公告)号：US20110317256A1

公开(公告)日：2011-12-29

申请号：US13077236

申请日：2011-03-31

申请人： Kai-Chung Hou ,  Richard L. Sandstorm ,  William N. Partlo ,  Daniel J.W. Brown ,  Igor V. Fomenkov

发明人： Kai-Chung Hou ,  Richard L. Sandstorm ,  William N. Partlo ,  Daniel J.W. Brown ,  Igor V. Fomenkov

IPC分类号： H01S3/05 ,  H01S3/00 ,  H01S3/13

CPC分类号： H01S3/0078 ,  G03F7/70033 ,  G03F7/70175 ,  G03F7/70908 ,  G03F7/70933 ,  H01S3/076 ,  H01S3/1055 ,  H01S3/117 ,  H01S3/2232 ,  H05G2/008

摘要： A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ1 and λ2, with λ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ1; a main pulse seed laser generating a laser output having wavelength, λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.

摘要翻译： 本文描述了一种可以包括具有包括λ1≠λ2的波长λ1和λ2的增益带的光放大器的装置; 具有用于将预脉冲输出调谐到波长λ1的调谐模块的预脉冲种子激光器; 产生具有波长λ2的激光输出的主脉冲种子激光器; 以及用于将预脉冲输出和主脉冲输出引导到通过光放大器的公共路径上的光束组合器。

公开(公告)号：US20110253349A1

公开(公告)日：2011-10-20

申请号：US12900762

申请日：2010-10-08

申请人： Alexander I. Ershov ,  Robert L. Morse ,  William N. Partlo ,  Christopher P. Pate

发明人： Alexander I. Ershov ,  Robert L. Morse ,  William N. Partlo ,  Christopher P. Pate

IPC分类号： F28F13/12

CPC分类号： H05G2/008 ,  G02B7/008 ,  G03F7/70033 ,  G03F7/70891 ,  Y10T137/0318 ,  Y10T137/8593

摘要： Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.

摘要翻译： 本文描述的装置可以包括具有非平面表面的光学元件，非平面表面具有光学活性部分; 以及引导气体在非平面表面上的流动引导件，以在非平面表面的光学活性部分的至少一部分上产生湍流，以冷却光学元件。

公开(公告)号：US20110249691A1

公开(公告)日：2011-10-13

申请号：US12755772

申请日：2010-04-07

申请人： Kevin M. O'Brien ,  Fedor B. Trintchouk

发明人： Kevin M. O'Brien ,  Fedor B. Trintchouk

IPC分类号： H01S3/10

CPC分类号： H01S3/2308 ,  H01S3/134 ,  H01S3/225

摘要： An apparatus includes a light source that produces a light beam, a bandwidth measurement system, a plurality of bandwidth actuation systems, and a control system. Each bandwidth actuation system includes one or more bandwidth actuators and each bandwidth actuation system is connected to an optical feature that is optically coupled to the produced light beam and operable to modify the connected optical feature to select a bandwidth within a bandwidth range of the produced light beam. The control system is connected to the bandwidth measurement system and to the plurality of bandwidth actuation systems. The control system is configured to switch between activating and operating a first bandwidth actuation system and activating and operating a second bandwidth actuation system independently and separately of activating and operating the first bandwidth actuation system based on a provided bandwidth measurement and a selected target bandwidth.

摘要翻译： 一种装置包括产生光束的光源，带宽测量系统，多个带宽致动系统和控制系统。 每个带宽致动系统包括一个或多个带宽致动器，并且每个带宽致动系统连接到光学特征，该光学特征光学地耦合到所产生的光束并且可操作以修改所连接的光学特征，以在所产生的光的带宽范围内选择带宽 光束。 控制系统连接到带宽测量系统和多个带宽致动系统。 控制系统被配置为在激活和操作第一带宽致动系统之间切换，并且基于所提供的带宽测量和所选择的目标带宽，独立且独立地激活和操作第一带宽致动系统来激活和操作第二带宽致动系统。