发明申请
- 专利标题: SYSTEMS AND METHODS FOR SIMULTANEOUS OPTICAL TESTING OF A PLURALITY OF DEVICES UNDER TEST
- 专利标题(中): 同时测试多种器件的光学测试系统和方法
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申请号: US13275107申请日: 2011-10-17
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公开(公告)号: US20120098559A1公开(公告)日: 2012-04-26
- 发明人: Bryan Bolt , Eric W. Strid , Kazuki Negishi , Steve Harris
- 申请人: Bryan Bolt , Eric W. Strid , Kazuki Negishi , Steve Harris
- 申请人地址: US OR Beaverton
- 专利权人: Cascade Microtech, Inc.
- 当前专利权人: Cascade Microtech, Inc.
- 当前专利权人地址: US OR Beaverton
- 主分类号: G01R31/20
- IPC分类号: G01R31/20
摘要:
Systems and methods for simultaneous optical testing of a plurality of devices under test. These systems and methods may include the use of an optical probe assembly that includes a power supply structure that is configured to provide an electric current to a plurality of devices under test (DUTs) and an optical collection structure that is configured to simultaneously collect electromagnetic radiation that may be produced by the plurality of DUTs and to provide the collected electromagnetic radiation to one or more optical detection devices. The systems and methods also may include the use of the optical probe assembly in an optical probe system to evaluate one or more performance parameters of each of the plurality of DUTs.
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