发明申请
- 专利标题: REACTOR AND METHOD FOR PRODUCTION OF SILICON
- 专利标题(中): 用于生产硅的反应器和方法
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申请号: US13266850申请日: 2010-05-27
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公开(公告)号: US20120100060A1公开(公告)日: 2012-04-26
- 发明人: Josef Filtvedt , Werner O. Filtvedt
- 申请人: Josef Filtvedt , Werner O. Filtvedt
- 优先权: NO20092111 20090529
- 国际申请: PCT/EP2010/057329 WO 20100527
- 主分类号: C23C16/24
- IPC分类号: C23C16/24 ; B01J19/00
摘要:
Reactor for producing silicon by chemical vapor deposition, the reactor comprising a reactor body that forms a container, at least one inlet for a silicon-bearing gas, at least one outlet, and at least one heating device as a part of or operatively arranged to the reactor, distinctive in that at least one main part of the reactor, which part is exposed for silicon-bearing gas and which part is heated for deposition of silicon on said part, is produced from silicon. Method for operation of the reactor.
公开/授权文献
- US09156704B2 Reactor and method for production of silicon 公开/授权日:2015-10-13
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