发明申请
US20120100060A1 REACTOR AND METHOD FOR PRODUCTION OF SILICON 有权
用于生产硅的反应器和方法

  • 专利标题: REACTOR AND METHOD FOR PRODUCTION OF SILICON
  • 专利标题(中): 用于生产硅的反应器和方法
  • 申请号: US13266850
    申请日: 2010-05-27
  • 公开(公告)号: US20120100060A1
    公开(公告)日: 2012-04-26
  • 发明人: Josef FiltvedtWerner O. Filtvedt
  • 申请人: Josef FiltvedtWerner O. Filtvedt
  • 优先权: NO20092111 20090529
  • 国际申请: PCT/EP2010/057329 WO 20100527
  • 主分类号: C23C16/24
  • IPC分类号: C23C16/24 B01J19/00
REACTOR AND METHOD FOR PRODUCTION OF SILICON
摘要:
Reactor for producing silicon by chemical vapor deposition, the reactor comprising a reactor body that forms a container, at least one inlet for a silicon-bearing gas, at least one outlet, and at least one heating device as a part of or operatively arranged to the reactor, distinctive in that at least one main part of the reactor, which part is exposed for silicon-bearing gas and which part is heated for deposition of silicon on said part, is produced from silicon. Method for operation of the reactor.
公开/授权文献
信息查询
0/0