发明申请
US20120101619A1 MEASUREMENT METHOD AND MEASUREMENT SYSTEM USING THE SAME 有权
使用该方法的测量方法和测量系统

MEASUREMENT METHOD AND MEASUREMENT SYSTEM USING THE SAME
摘要:
Example embodiments relate to a measurement method of measuring lots with improved process efficiency. The measurement method may include calculating a measurement capability (indicating a degree to which members to be measured may be processed per unit time in a measurement device); allocating the measurement capability according to a processing device and a processing condition; and calculating a measurement ratio of the lots processed by the processing device and the processing condition.
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