Invention Application
US20120103799A1 METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE 有权
流体加工工艺的方法和装置

METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
Abstract:
A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
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