发明申请
- 专利标题: NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 非易失性存储器件及其制造方法
-
申请号: US13344680申请日: 2012-01-06
-
公开(公告)号: US20120104340A1公开(公告)日: 2012-05-03
- 发明人: Yasuhito Yoshimizu , Fumiki Aiso , Atsushi Fukumoto , Takashi Nakao
- 申请人: Yasuhito Yoshimizu , Fumiki Aiso , Atsushi Fukumoto , Takashi Nakao
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-247549 20080926
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A nonvolatile memory device includes: a substrate; a stacked structure member including a plurality of dielectric films and a plurality of electrode films alternately stacked on the substrate and including a through-hole penetrating through the plurality of the dielectric films and the plurality of the electrode films in a stacking direction of the plurality of the dielectric films and the plurality of the electrode films; a semiconductor pillar provided in the through-hole; and a charge storage layer provided between the semiconductor pillar and each of the plurality of the electrode films. At least one of the dielectric films includes a film generating one of a compressive stress and a tensile stress, and at least one of the electrode films includes a film generating the other of the compressive stress and the tensile stress.
公开/授权文献
- US08546786B2 Stacked multiple cell nonvolatile memory device 公开/授权日:2013-10-01
信息查询
IPC分类: