发明申请
- 专利标题: EMBEDDED SERIES DEEP TRENCH CAPACITORS AND METHODS OF MANUFACTURE
- 专利标题(中): 嵌入式系列深度电容器及其制造方法
-
申请号: US13349158申请日: 2012-01-12
-
公开(公告)号: US20120104551A1公开(公告)日: 2012-05-03
- 发明人: Timothy W. KEMERER , James S. NAKOS , Steven M. SHANK
- 申请人: Timothy W. KEMERER , James S. NAKOS , Steven M. SHANK
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L29/92
- IPC分类号: H01L29/92
摘要:
Trench capacitors and methods of manufacturing the trench capacitors are provided. The trench capacitors are very dense series capacitor structures with independent electrode contacts. In the method, a series of capacitors are formed by forming a plurality of insulator layers and a plurality of electrodes in a trench structure, where each electrode is formed in an alternating manner with each insulator layer. The method further includes planarizing the electrodes to form contact regions for a plurality of capacitors.