发明申请
- 专利标题： MICROMACHINED STRUCTURES
- 专利标题（中）： MICROMACHINED结构
-
申请号： US13343187申请日： 2012-01-04
-
公开(公告)号： US20120107545A1公开(公告)日： 2012-05-03
- 发明人: Chuanwei Wang , Ming Han Tsai , Chih Ming Sun , Weileun Fang
- 申请人： Chuanwei Wang , Ming Han Tsai , Chih Ming Sun , Weileun Fang
- 申请人地址： TW Hsin-Chu
- 专利权人： PixArt Imaging Inc.
- 当前专利权人： PixArt Imaging Inc.
- 当前专利权人地址： TW Hsin-Chu
- 优先权： TW096139618 20071023
- 主分类号： B32B3/08
- IPC分类号： B32B3/08 ; B32B3/10
摘要：
A micromachined structure includes a substrate and a suspended structure. The substrate has a cavity formed thereon. The suspended structure is formed on the cavity of the substrate. The suspended structure includes a first metal layer, a second metal layer, and a first dielectric layer positioned between the first and second metal layers, wherein the first dielectric layer has a first opening in communication with the cavity through an opening formed in the first metal layer.
公开/授权文献
- US09070699B2 Micromachined structures 公开/授权日：2015-06-30
信息查询
