公开(公告)号：US10168219B2

公开(公告)日：2019-01-01

申请号：US14726472

申请日：2015-05-30

申请人： Chih-Ming Sun ,  Ming-Han Tsai

发明人： Chih-Ming Sun ,  Ming-Han Tsai

IPC分类号： G01J5/02 ,  B81B7/02 ,  H04N5/225 ,  B81B7/00

摘要： The present invention discloses a wearable device with combined sensing capabilities, which includes a wearable assembly and at least one multi-function sensor module. The wearable assembly is suitable to be worn on a part of a user's body. The wearable assembly includes at least one light-transmissible window. The multi-function sensor module is located inside the wearable assembly, for performing an image sensing function and an infrared temperature sensing function. The multi-function sensor module includes an image sensor module for sensing a physical or a biological feature of an object through the light-transmissible window by way of image sensing; and an infrared temperature sensor module for sensing temperature through the light-transmissible window by way of infrared temperature sensing.

公开(公告)号：US20160273967A1

公开(公告)日：2016-09-22

申请号：US14726472

申请日：2015-05-30

申请人： Chih-Ming Sun ,  Ming-Han Tsai

发明人： Chih-Ming Sun ,  Ming-Han Tsai

IPC分类号： G01J5/02 ,  B81B7/02 ,  H04N5/33 ,  G01K7/02

CPC分类号： G01J5/0265 ,  B81B7/0025 ,  B81B7/0061 ,  B81B7/02 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0278 ,  G01J5/0025 ,  G01J5/027 ,  G01J5/04 ,  G01J5/046 ,  G01J5/14 ,  H01L2224/48091 ,  H01L2924/16151 ,  H01L2924/16153 ,  H01L2924/16235 ,  H04N5/2256 ,  H01L2924/00014

摘要： The present invention discloses a wearable device with combined sensing capabilities, which includes a wearable assembly and at least one multi-function sensor module. The wearable assembly is suitable to be worn on a part of a user's body. The wearable assembly includes at least one light-transmissible window. The multi-function sensor module is located inside the wearable assembly, for performing an image sensing function and an infrared temperature sensing function. The multi-function sensor module includes an image sensor module for sensing a physical or a biological feature of an object through the light-transmissible window by way of image sensing; and an infrared temperature sensor module for sensing temperature through the light-transmissible window by way of infrared temperature sensing.

摘要翻译： 本发明公开了一种具有组合感测能力的可佩戴装置，其包括可穿戴组件和至少一个多功能传感器模块。 可穿戴组件适合佩戴在使用者身体的一部分上。 可穿戴组件包括至少一个透光窗。 多功能传感器模块位于可穿戴组件的内部，用于执行图像感测功能和红外温度感测功能。 多功能传感器模块包括图像传感器模块，用于通过图像感测通过光可透过窗口感测物体的物理或生物学特征; 以及用于通过红外温度感测通过透光窗口感测温度的红外温度传感器模块。

公开(公告)号：US20160090295A1

公开(公告)日：2016-03-31

申请号：US14790490

申请日：2015-07-02

申请人： Ming-Han Tsai ,  Hsin-Hui Hsu

发明人： Ming-Han Tsai ,  Hsin-Hui Hsu

IPC分类号： B81B7/00

CPC分类号： B81C1/00246 ,  B81B3/0086 ,  B81C2203/0742

摘要： The present invention discloses a MEMS device with low substrate capacitive coupling effect, which is manufactured by a CMOS manufacturing process. The MEMS device includes: a substrate; at least one anchor, including an oxide layer connected with the substrate and a connecting structure on the oxide layer; and at least one micro-electro-mechanical structure, connected with the connecting structure. The oxide layer is made by a process step corresponding to a process step for making a field oxide which defines a device region of a transistor in the CMOS manufacturing process. The connecting structure has at least one layer which has an out-of-plane projected area that is smaller than an out-of-plane projected area of the oxide layer. The substrate has plural recesses at an upper surface of the substrate facing the micro-electro-mechanical structure.

摘要翻译： 本发明公开了一种通过CMOS制造工艺制造的具有低衬底电容耦合效应的MEMS器件。 MEMS器件包括：衬底; 至少一个锚，包括与所述基底连接的氧化物层和所述氧化物层上的连接结构; 以及与连接结构连接的至少一个微电子机械结构。 该氧化物层是通过对应于制造在CMOS制造工艺中限定晶体管的器件区域的场氧化物的工艺步骤的工艺步骤制成的。 连接结构具有至少一个层，该层具有小于氧化物层的平面外投影面积的平面外投影面积。 基板在面向微电子机械结构的基板的上表面具有多个凹部。

公开(公告)号：US09290374B2

公开(公告)日：2016-03-22

申请号：US14450074

申请日：2014-08-01

申请人： Ming-Han Tsai

发明人： Ming-Han Tsai

IPC分类号： B81B3/00 ,  H01L29/84

CPC分类号： B81B3/0086 ,  B81B3/0021

摘要： The invention provides a micro-electro-mechanical device having differential capacitor of corresponding sizes, which includes a substrate; a top fixed electrode; a bottom fixed electrode; a mass, having a top electrode and a bottom electrode, wherein the top electrodes form a top capacitor with the top fixed electrode and the bottom electrodes form a bottom capacitor with the bottom fixed electrode; a top fixed electrode extension wall having an upper end connected to the top fixed electrode and a lower end connected to the substrate; and a bottom fixed electrode extension wall having a lower end connected to the substrate through the bottom electrode, wherein the bottom fixed electrode extension wall has no upper end connected to the top fixed electrode, and total areas of the top fixed electrode extension wall and the top fixed electrode facing the mass are substantially equal to total areas of the bottom fixed electrode extension wall and the bottom fixed electrode facing the mass.

摘要翻译： 本发明提供一种具有对应尺寸的差分电容器的微机电装置，其包括基板; 顶部固定电极; 底部固定电极; 具有顶部电极和底部电极的质量，其中顶部电极形成顶部电容器，顶部固定电极和底部电极与底部固定电极形成底部电容器; 顶部固定电极延伸壁，其上端连接到顶部固定电极，下端连接到基板; 以及底部固定电极延伸壁，其下端通过底部电极连接到基板，其中底部固定电极延伸壁没有连接到顶部固定电极的上端，并且顶部固定电极延伸壁和 面向质量的顶部固定电极基本上等于底部固定电极延伸壁和面向质量的底部固定电极的总面积。

公开(公告)号：US09244093B2

公开(公告)日：2016-01-26

申请号：US13688099

申请日：2012-11-28

申请人： Chih-Ming Sun ,  Ming-Han Tsai

发明人： Chih-Ming Sun ,  Ming-Han Tsai

IPC分类号： G01P15/08 ,  G01P15/09 ,  G01P15/00 ,  B81C1/00 ,  G01P15/125

CPC分类号： G01P15/0802 ,  B81B2201/025 ,  B81C1/0015 ,  G01P15/00 ,  G01P15/09 ,  G01P15/0922 ,  G01P15/125 ,  G01P2015/0837

摘要： A micro-electro-mechanical sensing device including a substrate, a semiconductor layer, a supporting pillar, a first suspended arm, a connecting member, a second suspended arm, and a proof mass is provided. The semiconductor layer is disposed on or above the substrate. The supporting pillar is disposed on or above the semiconductor layer. The first suspended arm is disposed on the supporting pillar. The supporting connects a portion of the first suspended arm. The connecting member directly or indirectly connects another portion of the first suspended arm. The second suspended arm has a first surface and a second surface opposite to the first surface. The connecting member connects a portion of the first surface. The proof mass connects the second suspended arm and it includes a portion of the second suspended arm as a portion of the proof mass. A method for manufacturing the device is also provided.

摘要翻译： 提供了一种包括衬底，半导体层，支撑柱，第一悬臂，连接构件，第二悬臂和校验块的微机电感测装置。 半导体层设置在基板上或上方。 支撑柱设置在半导体层上或上方。 第一悬挂臂设置在支撑柱上。 支撑件连接第一悬臂的一部分。 连接构件直接或间接连接第一悬臂的另一部分。 第二悬臂具有与第一表面相对的第一表面和第二表面。 连接构件连接第一表面的一部分。 检验质量块连接第二悬臂，并且其包括第二悬臂的一部分作为证明块的一部分。 还提供了一种用于制造该装置的方法。

公开(公告)号：US20140109680A1

公开(公告)日：2014-04-24

申请号：US14049850

申请日：2013-10-09

申请人： Ming-Han Tsai

发明人： Ming-Han Tsai

IPC分类号： G01L11/04 ,  B81C1/00

CPC分类号： G01L11/04 ,  B81B3/007 ,  B81B2201/0257 ,  G01L9/0072 ,  H04R19/00 ,  H04R19/005 ,  H04R2201/003

摘要： The invention provides a micro-electro-mechanical device which includes a substrate, an electrode, and a diaphragm. The electrode includes plural vent holes. The diaphragm is disposed above and in parallel to the electrode, to form a capacitive sensor with the electrode. The diaphragm includes plural ribs protruding upward and/or downward from the diaphragm; the ribs are respectively disposed in correspondence to the plural vent holes and do not overlap nor contact the electrode. A method for making the micro-electro-mechanical device is also provided according to the present invention.

摘要翻译： 本发明提供了一种微电子机械装置，其包括基板，电极和隔膜。 电极包括多个通气孔。 隔膜设置在电极上方并与电极平行，以形成具有电极的电容传感器。 隔膜包括从隔膜向上和/或向下突出的多个肋; 所述肋分别对应于所述多个通气孔设置，并且不重叠或接触所述电极。 根据本发明还提供了一种制造微机电装置的方法。

公开(公告)号：US20130334623A1

公开(公告)日：2013-12-19

申请号：US13948128

申请日：2013-07-22

申请人： Chuan-Wei Wang ,  Ming-Han Tsai

发明人： Chuan-Wei Wang ,  Ming-Han Tsai

IPC分类号： B81B3/00

CPC分类号： B81B3/0021 ,  B81C1/00333 ,  B81C2203/0118 ,  B81C2203/0735 ,  G01L9/0073

摘要： The present invention discloses a MEMS sensing device which comprises a substrate, a MEMS device region, a film, an adhesive layer, a cover, at least one opening, and a plurality of leads. The substrate has a first surface and a second surface opposite the first surface. The MEMS device region is on the first surface, and includes a chamber. The film is overlaid on the MEMS device region to seal the chamber as a sealed space. The cover is mounted on the MEMS device region and adhered by the adhesive layer. The opening is on the cover or the adhesive layer, allowing the pressure of the air outside the device to pressure the film. The leads are electrically connected to the MEMS device region, and extend to the second surface.

摘要翻译： 本发明公开了一种MEMS感测装置，其包括衬底，MEMS器件区域，膜，粘合剂层，盖，至少一个开口和多个引线。 衬底具有与第一表面相对的第一表面和第二表面。 MEMS器件区域在第一表面上，并且包括腔室。 膜被覆盖在MEMS器件区域上，以密封腔室作为密封空间。 盖安装在MEMS器件区域上，并通过粘合剂层粘合。 开口在盖子或粘合剂层上，允许装置外的空气的压力对膜施加压力。 引线电连接到MEMS器件区域，并延伸到第二表面。

公开(公告)号：US20130139595A1

公开(公告)日：2013-06-06

申请号：US13482989

申请日：2012-05-29

申请人： Ming-Han Tsai ,  Chih-Ming Sun

发明人： Ming-Han Tsai ,  Chih-Ming Sun

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/084 ,  G01P2015/0845

摘要： The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.

摘要翻译： 本发明公开了一种三维微机电系统传感器。 传感器包括可移动的第一电极，多个可移动的第二电极，多个固定的第三电极和多个固定的第四电极。 第一电极及其相邻的第三电极形成至少一个第一电容器和至少一个第二电容器，并且第二电极及其相邻的第四电极形成至少一个第三电容器。 第一电容器的电容变化反映了沿着第一轴的检测质量块的位移，第二电容器的电容变化反映了沿第二轴的检验质量块的位移，并且第三电容器的电容变化反映了第三电容器的位移 沿着第三轴的检验质量。 第一，第二和第三轴定义三维坐标系。

公开(公告)号：US20120248555A1

公开(公告)日：2012-10-04

申请号：US13134262

申请日：2011-06-03

申请人： Chuan-Wei Wang ,  Ming-Han Tsai

发明人： Chuan-Wei Wang ,  Ming-Han Tsai

IPC分类号： H01L29/84 ,  H01L21/02

CPC分类号： B81B3/0021 ,  B81C1/00333 ,  B81C2203/0118 ,  B81C2203/0735 ,  G01L9/0073

摘要： The present invention discloses a MEMS sensing device which comprises a substrate, a MEMS device region, a film, an adhesive layer, a cover, at least one opening, and a plurality of leads. The substrate has a first surface and a second surface opposite the first surface. The MEMS device region is on the first surface, and includes a chamber. The film is overlaid on the MEMS device region to seal the chamber as a sealed space. The cover is mounted on the MEMS device region and adhered by the adhesive layer. The opening is on the cover or the adhesive layer, allowing the pressure of the air outside the device to pressure the film. The leads are electrically connected to the MEMS device region, and extend to the second surface.

摘要翻译： 本发明公开了一种MEMS感测装置，其包括衬底，MEMS器件区域，膜，粘合剂层，盖，至少一个开口和多个引线。 衬底具有与第一表面相对的第一表面和第二表面。 MEMS器件区域在第一表面上，并且包括腔室。 膜被覆盖在MEMS器件区域上，以密封腔室作为密封空间。 盖安装在MEMS器件区域上，并通过粘合剂层粘合。 开口在盖子或粘合剂层上，允许装置外的空气的压力对膜施加压力。 引线电连接到MEMS器件区域，并延伸到第二表面。

公开(公告)号：US20120146977A1

公开(公告)日：2012-06-14

申请号：US13150881

申请日：2011-06-01

申请人： Ming Han TSAI ,  Yuan Hsin TSOU ,  Kuang Lang Chen

发明人： Ming Han TSAI ,  Yuan Hsin TSOU ,  Kuang Lang Chen

IPC分类号： G09G5/00

CPC分类号： G09G3/3696 ,  G09G2320/041 ,  G09G2330/02

摘要： A working voltage switching system for a liquid crystal panel and a switching method thereof are presented. A timing controller of the panel acquires a liquid crystal enable signal to generate a clock signal, and a clock generator acquires the clock signal to control a liquid crystal control element of the liquid crystal panel, and acquires a basic signal supplied by a voltage supplier and a first signal provided by the voltage supplier and transferred by a switch, so as to adjust a signal difference of the clock signal. When a counter judges that the liquid crystal panel is enabled and a count condition is reached, a switch acts to transfer a second signal provided by the voltage supplier, and the clock signal is adjusted to satisfy a signal difference between the basic signal and the second signal.

摘要翻译： 提出了一种液晶面板的工作电压切换系统及其切换方法。 面板的定时控制器获取液晶使能信号以产生时钟信号，时钟发生器获取时钟信号以控制液晶面板的液晶控制元件，并获取由电压供应器提供的基本信号， 由电压提供器提供并由开关传送的第一信号，以便调整时钟信号的信号差。 当计数器判定液晶面板使能并且达到计数条件时，开关用于传送由电压供应器提供的第二信号，并且调整时钟信号以满足基本信号和第二信号之间的信号差 信号。