发明申请
- 专利标题: Corrosion-resistant article coated with aluminum nitride
- 专利标题(中): 涂有氮化铝的耐腐蚀制品
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申请号: US13137837申请日: 2011-09-16
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公开(公告)号: US20120107613A1公开(公告)日: 2012-05-03
- 发明人: Shoji Kano , Mitsumasa Kubota , Mitsuo Tanaka , Koji Kato , Waichi Yamamura
- 申请人: Shoji Kano , Mitsumasa Kubota , Mitsuo Tanaka , Koji Kato , Waichi Yamamura
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-243158 20101029
- 主分类号: B32B33/00
- IPC分类号: B32B33/00 ; C23C16/56 ; C23C16/34 ; C23C16/44 ; B32B9/00 ; B32B15/04
摘要:
A corrosion-resistant article is proposed which is coated with an aluminum nitride wherein the aluminum nitride grains contain oxygen by 0.1 mass % or greater but not greater than 20 mass % so that the thermal expansion coefficient of the coating layer is made even with that of the base body; the relative density of the coating layer is preferably 50% or higher but lower than 98%. It is preferred that the coating layer is first made by chemical vapor deposition and then subjected to an oxidizing atmosphere of a temperature of 700 degrees centigrade or higher but 1150 degrees centigrade or lower; or it is preferable that after the chemical vapor deposition step the coating layer is exposed to the natural atmosphere to adsorb hydrate and then subjected to a heat treatment in an inert atmosphere of a temperature of 900 degrees centigrade but 1300 degrees centigrade or lower.
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