公开(公告)号：US20120107613A1

公开(公告)日：2012-05-03

申请号：US13137837

申请日：2011-09-16

申请人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

发明人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

IPC分类号： B32B33/00 ,  C23C16/56 ,  C23C16/34 ,  C23C16/44 ,  B32B9/00 ,  B32B15/04

CPC分类号： C23C16/34 ,  C23C16/56 ,  Y10T428/30

摘要： A corrosion-resistant article is proposed which is coated with an aluminum nitride wherein the aluminum nitride grains contain oxygen by 0.1 mass % or greater but not greater than 20 mass % so that the thermal expansion coefficient of the coating layer is made even with that of the base body; the relative density of the coating layer is preferably 50% or higher but lower than 98%. It is preferred that the coating layer is first made by chemical vapor deposition and then subjected to an oxidizing atmosphere of a temperature of 700 degrees centigrade or higher but 1150 degrees centigrade or lower; or it is preferable that after the chemical vapor deposition step the coating layer is exposed to the natural atmosphere to adsorb hydrate and then subjected to a heat treatment in an inert atmosphere of a temperature of 900 degrees centigrade but 1300 degrees centigrade or lower.

摘要翻译： 提出了一种耐蚀制品，其涂覆有氮化铝，其中氮化铝颗粒含有0.1质量％以上但不大于20质量％的氧，使得涂层的热膨胀系数甚至与 基体; 涂层的相对密度优选为50％以上且低于98％。 优选首先通过化学气相沉积制造涂层，然后经受700摄氏度或更高但1150摄氏度或更低的氧化气氛; 或者优选在化学气相沉积步骤之后，将涂层暴露于天然气氛中以吸附水合物，然后在900摄氏度至1300摄氏度或更低的惰性气氛中进行热处理。