发明申请
- 专利标题: METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS
- 专利标题(中): 使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法
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申请号: US13351385申请日: 2012-01-17
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公开(公告)号: US20120111827A1公开(公告)日: 2012-05-10
- 发明人: Thomas R. Albrecht , Ricardo Ruiz
- 申请人: Thomas R. Albrecht , Ricardo Ruiz
- 主分类号: B05D3/10
- IPC分类号: B05D3/10 ; B05D5/12
摘要:
The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
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