发明申请
- 专利标题: NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US13380159申请日: 2011-07-13
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公开(公告)号: US20120112153A1公开(公告)日: 2012-05-10
- 发明人: Takeki Ninomiya , Satoru Fujii , Yukio Hayakawa , Takumi Mikawa
- 申请人: Takeki Ninomiya , Satoru Fujii , Yukio Hayakawa , Takumi Mikawa
- 优先权: JP2010-160125 20100714
- 国际申请: PCT/JP2011/004022 WO 20110713
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Provided is a nonvolatile memory device which requires a lower initializing voltage such that the nonvolatile memory device can be operated at a low voltage. The nonvolatile memory device (10) includes: a first electrode layer (105) formed above a semiconductor substrate (100); a first oxygen-deficient tantalum oxide layer (106x) formed on the first electrode layer (105) and having a composition represented by TaOx where 0.8≦x≦1.9; a second oxygen-deficient tantalum oxide layer (106y) formed on the first oxygen-deficient tantalum oxide layer (106x) and having a composition represented by TaOy where 2.1≦y; and a second electrode layer (107) formed on the second tantalum oxide layer (106y). The second tantalum oxide layer (106y) has a pillar structure including a plurality of pillars.
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