发明申请
- 专利标题： ANGLE-RESOLVED ANTISYMMETRIC SCATTEROMETRY
- 专利标题（中）： 角解决的反对称散射测量
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申请号： US13386524申请日： 2010-07-21
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公开(公告)号： US20120120396A1公开(公告)日： 2012-05-17
- 发明人: Daniel Kandel , Vladimir Levinski , Noam Sapiens
- 申请人： Daniel Kandel , Vladimir Levinski , Noam Sapiens
- 申请人地址： US CA Milpitas
- 专利权人： KLA-TENCOR CORPORATION
- 当前专利权人： KLA-TENCOR CORPORATION
- 当前专利权人地址： US CA Milpitas
- 国际申请： PCT/US10/42738 WO 20100721
- 主分类号： G01B11/00
- IPC分类号： G01B11/00
摘要：
A method for determining an overlay offset may include, but is not limited to: obtaining a first anti-symmetric differential signal (ΔS1) associated with a first scatterometry cell; obtaining a second anti-symmetric differential signal (ΔS2) associated with a second scatterometry cell and computing an overlay offset from the first anti-symmetric differential (ΔS1) signal associated with the first scatterometry cell and the second anti-symmetric differential signal (ΔS2) associated with the second scatterometry cell.
公开/授权文献
- US08848186B2 Angle-resolved antisymmetric scatterometry 公开/授权日：2014-09-30
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