发明申请
US20120125520A1 ULTRASONIC BONDING TOOL, METHOD FOR MANUFACTURING ULTRASONIC BONDING TOOL, ULTRASONIC BONDING METHOD, AND ULTRASONIC BONDING APPARATUS
审中-公开
超声波接合工具,制造超声波接合工具的方法,超声波接合方法和超声波接合装置
- 专利标题: ULTRASONIC BONDING TOOL, METHOD FOR MANUFACTURING ULTRASONIC BONDING TOOL, ULTRASONIC BONDING METHOD, AND ULTRASONIC BONDING APPARATUS
- 专利标题(中): 超声波接合工具,制造超声波接合工具的方法,超声波接合方法和超声波接合装置
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申请号: US13379669申请日: 2009-06-23
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公开(公告)号: US20120125520A1公开(公告)日: 2012-05-24
- 发明人: Akio Yoshida , Masahisa Kogura
- 申请人: Akio Yoshida , Masahisa Kogura
- 申请人地址: JP Tokyo
- 专利权人: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL. SYS. CORP.
- 当前专利权人: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL. SYS. CORP.
- 当前专利权人地址: JP Tokyo
- 国际申请: PCT/JP2009/061384 WO 20090623
- 主分类号: B32B37/10
- IPC分类号: B32B37/10 ; B24B1/00 ; B24C1/00 ; B32B41/00
摘要:
An object of the present invention is to provide an ultrasonic bonding tool capable of bonding a lead wire, without any trouble, even to a surface of a thin-film base having a plate thickness of 2 mm or less such as a glass substrate. In the present invention, a surface portion of a chip portion (1c) of an ultrasonic bonding tool (1) used in an ultrasonic bonding apparatus has a plurality of planar portions (10) formed so as to be separated from one another, and a plurality of concavities (11) formed between the plurality of planar portions. Each of the plurality of planar portions (10) has a flatness of 2 μm or less.
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