The invention provides a process for preparing carbamatoorganosilanes (S) of the general formula (7) in which a haloorganosilane (S1) of the general formula (8) X—R2—SiR3(3-x)(OR4)x   (8) is reacted with a metal cyanate (MOCN) and an alcohol (A) of the general formula (9) R1OH   (9) in the presence of at least one aprotic solvent (L), where R1, R3 and R4 are each an unsubstituted or halogen-substituted hydrocarbyl radical having 1-10 carbon atoms, R2 is a divalent unsubstituted or halogen-substituted hydrocarbyl radical which has 1-10 carbon atoms and may be interrupted by nonadjacent oxygen atoms, X is a halogen atom, and x is a value of 0, 1, 2 or 3, where the removal of the solid metal halides formed as by-products and of any solid metal cyanate residues still present is preceded by distillative removal of at least 50% of the solvent (L).