发明申请
- 专利标题: DEVICE FOR CLEANING SUBSTRATES ON A CARRIER
- 专利标题(中): 用于清洁载体上的基板的装置
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申请号: US13356259申请日: 2012-01-23
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公开(公告)号: US20120132236A1公开(公告)日: 2012-05-31
- 发明人: Christoph Hartmann , Sven Worm
- 申请人: Christoph Hartmann , Sven Worm
- 申请人地址: DE Freudenstadt
- 专利权人: GEBR. SCHMID GMBH
- 当前专利权人: GEBR. SCHMID GMBH
- 当前专利权人地址: DE Freudenstadt
- 优先权: DE102009035341.0 20090723
- 主分类号: B08B3/04
- IPC分类号: B08B3/04
摘要:
An apparatus for cleaning substrates on a carrier, which has in the interior thereof a plurality of longitudinal passages, which run parallel to one another and are connected to the outside at the underside of the carrier via openings. There is provided a plurality of elongated pipes, which are arranged on a pipe holder and are connected in a fluid-conducting manner to a fluid supply. A centring template is provided, which encompasses the pipes and is displaceable in the longitudinal direction thereof between an attachment position in the end region of the pipes away from the pipe holder and a working position, which lies between the attachment position and the pipe holder. The centring template bears against the carrier, such that the pipes are then aligned exactly with the longitudinal passages.
公开/授权文献
- US08387636B2 Device for cleaning substrates on a carrier 公开/授权日:2013-03-05
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