发明申请
- 专利标题： PIEZOELECTRIC RESONATING DEVICE, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC RESONATOR, AND PIEZOELECTRIC OSCILLATOR
- 专利标题（中）： 压电谐振器，其制造方法，压电谐振器和压电振荡器
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申请号： US13308929申请日： 2011-12-01
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公开(公告)号： US20120137775A1公开(公告)日： 2012-06-07
- 发明人: Akinori YAMADA
- 申请人： Akinori YAMADA
- 申请人地址： JP Tokyo
- 专利权人： SEIKO EPSON CORPORATION
- 当前专利权人： SEIKO EPSON CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-269063 20101202
- 主分类号： G01P3/48
- IPC分类号： G01P3/48 ; H01L41/22 ; H01L41/107 ; H01L41/04 ; H01L41/053
摘要：
A piezoelectric substrate includes rod-shaped resonating arms; a base portion that connects one set of end portions of the respective resonating arms; weight portions which are formed on the other end portions of the respective resonating arms and which have a width larger than that of the respective resonating arms; and groove portions which are formed on each of the front and rear surfaces along the center line of vibration of the respective resonating arms. The piezoelectric substrate also includes excitation electrodes which are formed on each of the front and rear surfaces of the respective resonating arms including the inner side of the respective groove portions. A plurality of frequency adjustment slits extending in a straight line form along the longitudinal direction of the respective resonating arms are formed on the respective weight portions so as to penetrate through the front and rear surfaces of the weight portions.
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