发明申请
- 专利标题: OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- 专利标题(中): 光学系统,特别是微波投影曝光装置
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申请号: US13368541申请日: 2012-02-08
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公开(公告)号: US20120140241A1公开(公告)日: 2012-06-07
- 发明人: Albrecht Hof , Dietmar Neugebauer , Rolf Freimann
- 申请人: Albrecht Hof , Dietmar Neugebauer , Rolf Freimann
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT GMBH
- 当前专利权人: CARL ZEISS SMT GMBH
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102009043501.8 20090930; DE102009054860.2 20091217
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01B9/02 ; G02B7/182 ; G01B11/06
摘要:
An optical system, such as a microlithographic projection exposure apparatus, includes a first optical component, a second optical component, and a measurement arrangement for determining the relative position of the first optical component and the second optical component in six degrees of freedom. The measurement arrangement is adapted to determine the relative position of the first optical component and the second optical component over six different length measurement sections. The length measurement sections extend directly between the first optical component and the second optical component.
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