- 专利标题： COMBINATORIAL PROCESS SYSTEM
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申请号： US13372729申请日： 2012-02-14
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公开(公告)号： US20120142197A1公开(公告)日： 2012-06-07
- 发明人: Rick Endo , Kurt Weiner , Indranil De , James Tsung , Maosheng Zhao , Jeremy Cheng
- 申请人： Rick Endo , Kurt Weiner , Indranil De , James Tsung , Maosheng Zhao , Jeremy Cheng
- 申请人地址： US CA San Jose
- 专利权人： Intermolecular, Inc.
- 当前专利权人： Intermolecular, Inc.
- 当前专利权人地址： US CA San Jose
- 主分类号： H01L21/31
- IPC分类号： H01L21/31 ; C23C16/458 ; C23C16/50 ; B65H1/00
摘要：
A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
公开/授权文献
- US08387563B2 Combinatorial process system 公开/授权日：2013-03-05
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