发明申请
US20120145080A1 SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING THIN LAYER USING THE SAME
审中-公开
基板支撑单元，以及使用其沉积薄层的装置和方法
- 专利标题： SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING THIN LAYER USING THE SAME
- 专利标题（中）： 基板支撑单元，以及使用其沉积薄层的装置和方法
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申请号： US13323214申请日： 2011-12-12
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公开(公告)号： US20120145080A1公开(公告)日： 2012-06-14
- 发明人: YOUNGKYOU PARK , Jeongsoo Suh , Wangoo Hwang , Hoonsang Choi , Jongrok Park
- 申请人： YOUNGKYOU PARK , Jeongsoo Suh , Wangoo Hwang , Hoonsang Choi , Jongrok Park
- 优先权： KR10-2010-0127156 20101213
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; C23C16/46 ; B23Q1/64 ; C23C16/455
摘要：
A substrate support unit includes a support member configured to accommodate a plurality of substrate holders and a driving member configured to rotate the substrate holders and the support member on their respective axes.
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IPC分类:
