发明申请
- 专利标题： IMAGING OPTICAL SYSTEM AND ILLUMINATION OPTICAL SYSTEM
- 专利标题（中）： 成像光学系统和照明光学系统
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申请号： US13326516申请日： 2011-12-15
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公开(公告)号： US20120147347A1公开(公告)日： 2012-06-14
- 发明人: Hans-Juergen Mann , Johannes Zellner , Aurelian Dodoc , Marco Pretorius , Christoph Menke , Wilhelm Ulrich , Martin Endres
- 申请人： Hans-Juergen Mann , Johannes Zellner , Aurelian Dodoc , Marco Pretorius , Christoph Menke , Wilhelm Ulrich , Martin Endres
- 申请人地址： DE Oberkochen
- 专利权人： CARL ZEISS SMT GMBH
- 当前专利权人： CARL ZEISS SMT GMBH
- 当前专利权人地址： DE Oberkochen
- 优先权： DE102009030501.7 20090624
- 主分类号： G03B27/54
- IPC分类号： G03B27/54 ; G02B17/06 ; B01J19/12 ; B82Y20/00
摘要：
An imaging optical system has a plurality of mirrors, which image an object field in an object plane into an image field in an image plane. A reflection face of at least one of the mirrors is configured as a free form face which cannot be described by a rotationally symmetrical function. The object field has an aspect ratio greater than 1. A ratio of a minimal and a maximal transverse dimension of the object field can be less than 0.9.
公开/授权文献
- US09182578B2 Imaging optical system and illumination optical system 公开/授权日：2015-11-10