Invention Application
- Patent Title: Semiconductor Device and Method of Forming the Same
- Patent Title (中): 半导体器件及其形成方法
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Application No.: US13240533Application Date: 2011-09-22
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Publication No.: US20120153498A1Publication Date: 2012-06-21
- Inventor: Un-Byoung Kang , Kwang-chul Choi , Jung-Hwan Kim , Tae Hong Min , Hojin Lee , Minseung Yoon
- Applicant: Un-Byoung Kang , Kwang-chul Choi , Jung-Hwan Kim , Tae Hong Min , Hojin Lee , Minseung Yoon
- Priority: KR10-2010-0129238 20101216
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
In a semiconductor device, an organic insulation pattern is disposed between first and second rerouting patterns. The organic insulation pattern may absorb the physical stress that occurs when the first and second rerouting patterns expand under heat. Since the organic insulation pattern is disposed between the first and second rerouting patterns, insulating properties can be increased relative to a semiconductor device in which a semiconductor pattern is disposed between rerouting patterns. Also, since a seed layer pattern is disposed between the first and second rerouting patterns and the organic insulation pattern and between the substrate and the organic insulation pattern, the adhesive strength of the first and second rerouting patterns is enhanced. This also reduces any issues with delamination. Also, the seed layer pattern prevents the metal that forms the rerouting pattern from being diffused to the organic insulation pattern. Therefore, a semiconductor device with enhanced reliability may be implemented.
Public/Granted literature
- US08450856B2 Semiconductor device and method of forming the same Public/Granted day:2013-05-28
Information query
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