发明申请
- 专利标题： Showerhead for Processing Chamber
- 专利标题（中）： 加工室喷头
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申请号： US12973845申请日： 2010-12-20
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公开(公告)号： US20120156877A1公开(公告)日： 2012-06-21
- 发明人: Lipyeow Yap , Jay DeDontney , Shouqian Shao , Jason Wright
- 申请人： Lipyeow Yap , Jay DeDontney , Shouqian Shao , Jason Wright
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; B08B7/00 ; B05C5/00 ; H01L21/31 ; B05B7/16 ; H01L21/306
摘要：
A top assembly for a processing chamber having a back plate and a hub is provided. The back plate has a first portion and a second portion. The first portion is connected to the second portion through a central region of the back plate, wherein a gap is defined between opposing surfaces of the first and second portions outside the central region. The first portion includes an embedded heating element. The hub is affixed to a top surface of the second portion of the back plate over the central region. The hub has a top surface with a plurality of channel openings defined within a central region of the hub and a bottom surface having a central extension with a plurality of channels defined therethrough. The bottom surface includes an annular extension spaced apart from the central extension.
公开/授权文献
- US08733280B2 Showerhead for processing chamber 公开/授权日：2014-05-27
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