Invention Application
- Patent Title: Spectrometer
- Patent Title (中): 光谱仪
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Application No.: US13221899Application Date: 2011-08-31
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Publication No.: US20120162642A1Publication Date: 2012-06-28
- Inventor: Mark Watson , Shane Buller , Keith Carron
- Applicant: Mark Watson , Shane Buller , Keith Carron
- Applicant Address: US WY Centennial
- Assignee: MKS Technology (d/b/a Snowy Range Instruments)
- Current Assignee: MKS Technology (d/b/a Snowy Range Instruments)
- Current Assignee Address: US WY Centennial
- Main IPC: G01J3/443
- IPC: G01J3/443

Abstract:
A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable minor, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
Public/Granted literature
- US08988678B2 Spectrometer Public/Granted day:2015-03-24
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