An integrated X-ray source is provided. The integrated X-ray source includes a target for emitting X-rays upon being struck by one or more excitation beams, and one or more total internal reflection multilayer optic devices in physical contact with the target to transmit at least a portion of the X rays through total internal reflection to produce X-ray beams, wherein the optic device comprises an input face for receiving the X rays and an output face through which the X-ray beams exit the integrated X-ray source.