发明申请
- 专利标题: Semiconductor Constructions Containing Tubular Capacitor Storage Nodes, And Retaining Structures Along Portions Of The Tubular Capacitor Storage Nodes
- 专利标题(中): 包含管状电容器存储节点和保留结构的半导体结构沿管状电容器存储节点的一部分
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申请号: US13413552申请日: 2012-03-06
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公开(公告)号: US20120168903A1公开(公告)日: 2012-07-05
- 发明人: H. Montgomery Manning , Thomas M. Graettinger
- 申请人: H. Montgomery Manning , Thomas M. Graettinger
- 申请人地址: US ID Boise
- 专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
The invention includes semiconductor constructions, and also includes methods of forming pluralities of capacitor devices. An exemplary method of the invention includes forming conductive storage node material within openings in an insulative material to form conductive containers. A retaining structure lattice is formed in physical contact with at least some of the containers, and subsequently the insulative material is removed to expose outer surfaces of the containers. The retaining structure can alleviate toppling or other loss of structural integrity of the container structures. The electrically conductive containers correspond to first capacitor electrodes. After the outer sidewalls of the containers are exposed, dielectric material is formed within the containers and along the exposed outer sidewalls. Subsequently, a second capacitor electrode is formed over the dielectric material. The first and second capacitor electrodes, together with the dielectric material, form a plurality of capacitor devices.
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