发明申请
- 专利标题: CVD APPARATUS AND METHOD OF FORMING SEMICONDUCTOR SUPERLATTICE STRUCTURE USING THE SAME
- 专利标题(中): CVD装置和使用其形成半导体超导结构的方法
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申请号: US13276729申请日: 2011-10-19
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公开(公告)号: US20120171815A1公开(公告)日: 2012-07-05
- 发明人: Jong Sun MAENG , Ki Sung Kim , Bum Joon Kim , Suk Ho Yoon , Hyun Seok Ryu , Sung Tae Kim
- 申请人: Jong Sun MAENG , Ki Sung Kim , Bum Joon Kim , Suk Ho Yoon , Hyun Seok Ryu , Sung Tae Kim
- 优先权: KR10-2011-0000535 20110104
- 主分类号: H01L21/50
- IPC分类号: H01L21/50 ; C23C16/458 ; C23C16/455
摘要:
Provided is a chemical vapor deposition (CVD) apparatus, including: a reaction chamber including an inner pipe having an internal space, and an external pipe configured to cover the inner pipe so as to maintain a sealing state thereof; a wafer holder disposed within the inner pipe and receiving a plurality of wafers stacked therein; and a gas supplier including at least one stem pipe disposed at the outside of the reaction chamber so as to supply a reactive gas thereto, a plurality of branch pipes connected to the stem pipe to introduce the reactive gas from the outside of the reaction chamber into the reaction chamber, and a plurality of spray nozzles provided with the branch pipes to spray the reactive gas to the plurality of respective wafers.
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