发明申请
- 专利标题： ELECTRICALLY PROGRAMMABLE FUSE USING ANISOMETRIC CONTACTS AND FABRICATION METHOD
- 专利标题（中）： 电气可编程保险丝使用异构联系和制造方法
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申请号： US13420724申请日： 2012-03-15
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公开(公告)号： US20120171857A1公开(公告)日： 2012-07-05
- 发明人: Chandrasekharan Kothandaraman , Dan Moy , Norman W. Robson , John M. Safran
- 申请人： Chandrasekharan Kothandaraman , Dan Moy , Norman W. Robson , John M. Safran
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L21/768
- IPC分类号： H01L21/768
摘要：
A fabrication method for fabricating an electrically programmable fuse method includes depositing a polysilicon layer on a substrate, patterning an anode contact region, a cathode contact region and a fuse link conductively connecting the cathode contact region with the anode contact region, which is programmable by applying a programming current, depositing a silicide layer on the polysilicon layer, and forming a plurality of anisometric contacts on the silicide layer of the cathode contact region and the anode contact region in a predetermined configuration, respectively.