发明申请
US20120174681A1 CAPACITIVE CERAMIC PRESSURE MEASURING CELL AND PRESSURE SENSOR WITH SUCH A PRESSURE MEASURING CELL 有权
电容式陶瓷压力测量单元和带压力测量单元的压力传感器

CAPACITIVE CERAMIC PRESSURE MEASURING CELL AND PRESSURE SENSOR WITH SUCH A PRESSURE MEASURING CELL
摘要:
A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.
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