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公开(公告)号：US09816887B2
公开(公告)日：2017-11-14
申请号：US14004228
申请日：2012-02-10
IPC分类号： G01L9/12 , G01L9/00 , C04B35/111 , C04B37/00 , B23K26/211 , B23K26/32 , B23K1/00 , B23K1/008 , B23K35/30 , B23K35/32 , C22C16/00 , C22C30/02 , B23K103/00 , B23K103/16 , B23K101/40
CPC分类号： G01L9/0048 , B23K1/0016 , B23K1/008 , B23K26/211 , B23K26/32 , B23K35/302 , B23K35/32 , B23K2101/40 , B23K2103/172 , B23K2103/52 , C04B35/111 , C04B37/006 , C04B2235/6565 , C04B2235/6581 , C04B2235/665 , C04B2235/786 , C04B2235/96 , C04B2237/122 , C04B2237/124 , C04B2237/126 , C04B2237/127 , C04B2237/343 , C04B2237/592 , C04B2237/60 , C04B2237/708 , C22C16/00 , C22C30/02 , G01L9/0075
摘要： A method for manufacturing a pressure measuring cell, which has a ceramic platform and a ceramic measuring membrane, wherein the measuring membrane is joined with the platform pressure tightly by an active hard solder, or braze, wherein the method includes: providing the platform, the measuring membrane and the active hard solder, or braze, positioning the active hard solder, or braze, between the platform and the measuring membrane; melting the active hard solder, or braze, by irradiating the active hard solder, or braze, by a laser, wherein the irradiating of the active hard solder, or braze, occurs through the measuring membrane; and letting the active hard solder, or braze, solidify by cooling.
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2.发明授权Capacitive ceramic pressure measuring cell and pressure sensor with such a pressure measuring cell 有权电容式陶瓷压力测量单元和压力传感器，带有这样的压力测量单元公开(公告)号：US08966989B2
公开(公告)日：2015-03-03
申请号：US13383696
申请日：2010-06-22
申请人： Ulfert Drewes , Thomas Uehlin , Elke Schmidt , Andreas Rossberg
发明人： Ulfert Drewes , Thomas Uehlin , Elke Schmidt , Andreas Rossberg
CPC分类号： G01L9/0075
摘要： A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.
摘要翻译： 一种电容式压力测量单元，包括陶瓷平台和陶瓷测量膜，它们沿接头压紧，在它们之间形成参考压力室。 测量膜具有面向平台的第一电极，并且平台具有面向测量膜的至少第二电极。 第一和第二电极之间的电容取决于外部作用在测量膜上的压力与参考压力室中的压力差之间的差异，其中接头具有厚度d，其限定了测量膜与测量膜之间的平衡距离 平台前方 在平台的前侧，布置有支撑层，其包括无机绝缘体，其中支撑层具有至少0.2的厚度，并且其中第二电极布置在支撑层上。
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3.发明申请CAPACITIVE CERAMIC PRESSURE MEASURING CELL AND PRESSURE SENSOR WITH SUCH A PRESSURE MEASURING CELL 有权电容式陶瓷压力测量单元和带压力测量单元的压力传感器公开(公告)号：US20120174681A1
公开(公告)日：2012-07-12
申请号：US13383696
申请日：2010-06-22
申请人： Ulfert Drewes , Thomas Uehlin , Elke Schmidt , Andreas Rossberg
发明人： Ulfert Drewes , Thomas Uehlin , Elke Schmidt , Andreas Rossberg
IPC分类号： G01L9/12
CPC分类号： G01L9/0075
摘要： A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.
摘要翻译： 一种电容式压力测量单元，包括陶瓷平台和陶瓷测量膜，它们沿接头压紧，在它们之间形成参考压力室。 测量膜具有面向平台的第一电极，并且平台具有面向测量膜的至少第二电极。 第一和第二电极之间的电容取决于外部作用在测量膜上的压力与参考压力室中的压力差之间的差异，其中接头具有厚度d，其限定了测量膜与测量膜之间的平衡距离 平台前方 在平台的前侧，布置有支撑层，其包括无机绝缘体，其中支撑层具有至少0.2的厚度，并且其中第二电极布置在支撑层上。
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公开(公告)号：US09625335B2
公开(公告)日：2017-04-18
申请号：US14000450
申请日：2012-02-10
IPC分类号： G01L9/00
CPC分类号： G01L9/00 , G01L9/0075
摘要： A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.
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公开(公告)号：US20130327151A1
公开(公告)日：2013-12-12
申请号：US14000450
申请日：2012-02-10
IPC分类号： G01L9/00
CPC分类号： G01L9/00 , G01L9/0075
摘要： A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.
摘要翻译： 压力测量单元包括至少一个陶瓷测量膜体; 和至少一个陶瓷平台，其中所述测量膜主体沿着环形的周边接头与所述平台连接。 接头形成为测量膜体和平台之间的焊接连接，其中测量膜体具有压力可变形的测量膜。 压力传感器包括压力测量单元和壳体，其中所述压力测量单元由所述壳体保持，并且其中所述压力测量单元关闭壳体开口，所述压力测量单元通过所述壳体开口与所述壳体的环境连通。 密封件夹在围绕壳体开口的密封表面和压力测量单元的密封表面之间。
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公开(公告)号：US20100199778A1
公开(公告)日：2010-08-12
申请号：US12451209
申请日：2008-06-04
申请人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译： 压力传感器包括平台1和弹性测量膜2，其与平台1的表面接合以形成密封在边缘处的测量室3，其中平台1和/或测量膜2包括陶瓷， 玻璃或单晶材料，测量膜至少具有面向平台2的表面的第一电极6，平台1的表面至少具有与测量膜2的表面相对的第二电极5， 其中所述第一电极和所述第二电极之间的电容是待测压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。
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公开(公告)号：US06374680B1
公开(公告)日：2002-04-23
申请号：US09511723
申请日：2000-02-21
申请人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
发明人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
IPC分类号： G01L912
CPC分类号： G01L9/0075
摘要： The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.
摘要翻译： 这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成：压力传感器（10）具有基板（1）和第一主表面（11），第二主表面（12） ）和圆周表面（13）。导电材料的板状电极（14）以高耐压和高真空密封的方式固定在主表面（11）的凹部（15）中，由 连接材料（16），从电极（14）穿过基板（1）到主表面（12）或圆周表面（13）提供贯通连接件（17），陶瓷的隔膜（2） 玻璃或单晶材料通过接合材料（26）沿着接头（18）附接到凹部（15）外部的基板（1）上，并且在其上面形成另外的电极或被覆盖在面向 电极（14），具有通过接头（18）接触的另一个电极（24）。基板和隔膜 t的陶瓷，玻璃或单晶材料。 各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。
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公开(公告)号：US08104353B2
公开(公告)日：2012-01-31
申请号：US12451209
申请日：2008-06-04
申请人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译： 压力传感器包括平台和弹性测量膜，其与平台的表面结合以形成密封在边缘处的测量室，其中平台和/或测量膜包括陶瓷，玻璃或单晶材料 测量膜至少具有面向平台表面的第一电极，平台的表面具有至少第二电极，其面向测量膜的表面。 第一电极和第二电极之间的电容是测量压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。
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公开(公告)号：US06941814B2
公开(公告)日：2005-09-13
申请号：US10498515
申请日：2002-12-18
申请人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
发明人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
CPC分类号： G01L9/0075
摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.
摘要翻译： 用于测量压力的压力传感器包括压力室; 以及变形体，其可以在压力下暴露于介质，并且另外至少部分地限定压力室并且与介质如此压力地密封; 其中传感器室的壁具有通过气相和/或气相沉积施加的疏水涂层。 疏水涂层优选包括硅烷。 特别优选的是具有一个或多个疏水基团R和一个或多个锚定基团X的硅烷。特别优选的是：R-Si-X 3，R 1 R 1， 2 -Si-X 2，R 1 R 2 R 3 -Si-X。 疏水性基团R优选为烷基，全氟烷基，苯基或全氟苯基。 锚定基团X优选为-OH（硅烷醇），-X（卤化物，例如-Cl），-OR（酯，例如-OCH 3），-NH 2（胺）或-SH（巯基甲硅烷）。 另外，脂族或环状硅氮烷-Si-NH-Si-，例如 六甲基二硅氮烷。 同样合适的是类型R a-Me-X z z的化合物，其中Me = Zr，Ti。
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公开(公告)号：US20120258322A1
公开(公告)日：2012-10-11
申请号：US13515342
申请日：2010-11-10
CPC分类号： G01L9/0075 , C04B37/006 , C04B2237/122 , C04B2237/343 , C04B2237/403 , C04B2237/708 , C04B2237/72
摘要： A ceramic product 1 includes a first ceramic part 2 and a second ceramic part 3, wherein the first ceramic part 2 is connected with the second ceramic part 3 via a joint, wherein the joint comprises an active hard solder, or braze, characterized in that the joint has an inhomogeneous distribution of the components of the active hard solder, or braze, wherein at least at an interface between the active hard solder, or braze, and the ceramic, the at least one active component of the active hard solder, or braze, is enriched. For manufacture of the product, the active hard solder, or braze, material is provided in such a manner, that at least one surface section of at least one of the ceramic parts is first coated with at least one active component of the active hard solder, or braze, and that on the coated section, an alloy is provided, which, by melting of the alloy during the heating, alloys with the coating and forms a metal joint between the two ceramic parts.
摘要翻译： 陶瓷制品1包括第一陶瓷部件2和第二陶瓷部件3，其中第一陶瓷部件2经由接头与第二陶瓷部件3连接，其中接头包括活性硬焊料或钎焊，其特征在于， 接头具有活性硬焊料或钎焊的组分的不均匀分布，其中至少在活性硬焊料或钎焊之间的界面处，和陶瓷，活性硬焊料的至少一种活性组分或 钎焊，富集。 为了制造产品，以这样的方式提供活性硬焊料或钎焊材料，即至少一个陶瓷部件的至少一个表面部分首先涂覆有活性硬焊料的至少一种活性组分 或钎焊，并且在涂覆部分上，提供合金，其通过在加热期间熔化合金而与涂层合金，并在两个陶瓷部件之间形成金属接头。
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