发明申请
- 专利标题: MICROMACHINED RESONANT MAGNETIC FIELD SENSORS
- 专利标题(中): 微型谐振磁场传感器
-
申请号: US13004365申请日: 2011-01-11
-
公开(公告)号: US20120176128A1公开(公告)日: 2012-07-12
- 发明人: Joseph SEEGER , Chiung C. LO , Baris CAGDASER , Derek SHAEFFER
- 申请人: Joseph SEEGER , Chiung C. LO , Baris CAGDASER , Derek SHAEFFER
- 申请人地址: US CA Sunnyvale
- 专利权人: INVENSENSE, INC.
- 当前专利权人: INVENSENSE, INC.
- 当前专利权人地址: US CA Sunnyvale
- 主分类号: G01R33/028
- IPC分类号: G01R33/028 ; G01R33/02
摘要:
A micromachined magnetic field sensor comprising is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.
公开/授权文献
- US08860409B2 Micromachined resonant magnetic field sensors 公开/授权日:2014-10-14
信息查询