发明申请
- 专利标题： METHOD OF FABRICATING PIEZOELECTRIC MATERIALS WITH OPPOSITE C-AXIS ORIENTATIONS
- 专利标题（中）： 用非对称C轴取向制作压电材料的方法
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申请号： US13428474申请日： 2012-03-23
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公开(公告)号： US20120177816A1公开(公告)日： 2012-07-12
- 发明人: John D. LARSON, III , Jyrki KAITILA , Stefan BADER
- 申请人： John D. LARSON, III , Jyrki KAITILA , Stefan BADER
- 申请人地址： SG Singapore
- 专利权人： Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- 当前专利权人： Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- 当前专利权人地址： SG Singapore
- 主分类号： H01L41/22
- IPC分类号： H01L41/22
摘要：
In accordance with a representative embodiment, a method, comprises: providing a substrate; forming a first piezoelectric layer having a compression-negative (CN) polarity over the substrate; and forming a second piezoelectric layer having a compression-positive (CP) over the substrate and adjacent to the first piezoelectric layer.