发明申请
- 专利标题: SENSOR WITH IMPROVED THERMAL STABILITY
- 专利标题(中): 具有改进的热稳定性的传感器
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申请号: US13006397申请日: 2011-01-13
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公开(公告)号: US20120180563A1公开(公告)日: 2012-07-19
- 发明人: Yong-Fa Wang , Scott Edward Beck
- 申请人: Yong-Fa Wang , Scott Edward Beck
- 申请人地址: US NJ Morristown
- 专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人地址: US NJ Morristown
- 主分类号: G01F1/692
- IPC分类号: G01F1/692 ; H01C17/06 ; B05D5/12
摘要:
Improved sensors are disclosed that include a heater resistor and/or one or more sensor resistors. In some instances, the heater resistor may be configured to have a zero or near-zero temperature coefficient of resistance (TCR), while one or more sensor resistors may be configured to have a non-zero higher TCR. In some instances, the heater resistor may include a polysilicon material that is doped with a first concentration of dopant, and the one or more sensing elements may include a polysilicon material that is doped with a second higher concentration of dopant. In some cases, the first concentration of dopant may be configured to provide a heater resistor that has a zero or near-zero temperature coefficient of resistance (TCR).
公开/授权文献
- US08356514B2 Sensor with improved thermal stability 公开/授权日:2013-01-22