发明申请
- 专利标题: LOW TCR HIGH RESISTANCE RESISTOR
- 专利标题(中): 低TCR高电阻电阻
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申请号: US13005681申请日: 2011-01-13
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公开(公告)号: US20120181612A1公开(公告)日: 2012-07-19
- 发明人: Jing-Hwang Yang , Chun-Heng Liao , Hsin-Li Cheng , Liang-Kai Han
- 申请人: Jing-Hwang Yang , Chun-Heng Liao , Hsin-Li Cheng , Liang-Kai Han
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L21/3205
摘要:
The present disclosure involves a method. The method includes providing a substrate including a top surface. The method also includes forming a gate over the top surface of the substrate. The formed gate has a first height measured from the top surface of the substrate. The method also includes etching the gate to reduce the gate to a second height. This second height is substantially less than the first height. The present disclosure also involves a semiconductor device. The semiconductor device includes a substrate. The substrate includes a top surface. The semiconductor device also includes a first gate formed over the top surface of the substrate. The first gate has a first height. The semiconductor device also includes a second gate formed over the top surface of the substrate. The second gate has a second height. The first height is substantially less than the second height.
公开/授权文献
- US09269758B2 Low TCR high resistance resistor 公开/授权日:2016-02-23
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