发明申请
US20120181636A1 Printing of Contact Metal and Interconnect Metal Via Seed Printing and Plating
有权
通过种子印刷和电镀印刷接触金属和互连金属
- 专利标题: Printing of Contact Metal and Interconnect Metal Via Seed Printing and Plating
- 专利标题(中): 通过种子印刷和电镀印刷接触金属和互连金属
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申请号: US13427091申请日: 2012-03-22
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公开(公告)号: US20120181636A1公开(公告)日: 2012-07-19
- 发明人: Aditi Chandra , Arvind Kamath , James Montague Cleeves , Joerg Rockenberger , Mao Takashima , Erik Scher
- 申请人: Aditi Chandra , Arvind Kamath , James Montague Cleeves , Joerg Rockenberger , Mao Takashima , Erik Scher
- 主分类号: H01L29/772
- IPC分类号: H01L29/772 ; H01L23/485 ; H01L21/336
摘要:
Methods of forming contacts (and optionally, local interconnects) using an ink comprising a silicide-forming metal, electrical devices such as diodes and/or transistors including such contacts and (optional) local interconnects, and methods for forming such devices are disclosed. Electrical devices, such as diodes and transistors may be made using such printed contact and/or local interconnects. A metal ink may be printed for contacts as well as for local interconnects at the same time, or in the alternative, the printed metal can act as a seed for electroless deposition of other metals if different metals are desired for the contact and the interconnect lines. This approach advantageously reduces the number of processing steps and does not necessarily require any etching.
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