Invention Application
US20120189960A1 Hydrophilic Monomer, Hydrophilic Photoresist Composition Containing the same, and Resist Pattern Formation Method 审中-公开
亲水单体,含有相同的亲水性光致抗蚀剂组合物和抗蚀剂图案形成方法

Hydrophilic Monomer, Hydrophilic Photoresist Composition Containing the same, and Resist Pattern Formation Method
Abstract:
The present invention is to provide a hydrophilic monomer, and hydrophilic photoresist composition containing the same. The photoresist composition further comprises a hydrophilic resin. The hydrophilic monomer and the hydrophilic resin respectively have a hydrophilic group which is used to react to H2O for the purpose of solving them in pure water. The present invention is also to provide a resist pattern formation method comprising spin coating a hydrophilic photoresist composition on a surface of a substrate to limit a photoresist layer. As a result, the photoresist layer can be developed by pure water. The present invention seeks to overcome the deficiencies in prior art which result in pollution of the environment and cost of photolithography by using basic developing solvent.
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