发明申请
- 专利标题： Thin film crystallization device and method for making a polycrystalline composition
- 专利标题（中）： 薄膜结晶装置及其制造方法
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申请号： US12931067申请日： 2011-01-24
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公开(公告)号： US20120190180A1公开(公告)日： 2012-07-26
- 发明人: Joseph D. LoBue , Dingyuan Lu , Louay Eldada
- 申请人： Joseph D. LoBue , Dingyuan Lu , Louay Eldada
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01B1/02 ; B01J19/00 ; H01B1/00
摘要：
A method for making a polycrystalline composition, wherein the method includes the steps of a) preparing a precursor material, b) heating the precursor material to a reaction temperature in the presence of a precursor vapor supplied from a source at a preselected partial pressure, for a sufficient time to initiate an interaction between the precursor material and the precursor vapor to form a heated precursor material, and c) cooling the heated precursor material at a predetermined cooling rate, optionally, in the presence of the precursor vapor supplied at a partial pressure, to yield the polycrystalline composition. A device for implementing the method of the present invention is also provided
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