System and method for sealing a vapor deposition source

    公开(公告)号:US08480805B2

    公开(公告)日:2013-07-09

    申请号:US12762024

    申请日:2010-04-16

    IPC分类号: C23C16/00

    摘要: A system and method for movably sealing a vapor deposition source is described. One embodiment includes a system for coating a substrate, the system comprising a deposition chamber; a vapor pocket located within the deposition chamber; and an at least one movable seal, wherein the at least one movable seal is configured to form a first seal with a first portion of a substrate, and wherein the first seal is configured to prevent a vapor from leaking past the first portion of the substrate out of the vapor pocket. In some embodiments, the movable seal may comprise a first flange, wherein the first flange forms a wall of the vapor pocket; and a second flange, wherein the second flange is configured to be movably disposed within a first groove of the source block.

    MODULAR PATIENT SUPPORT SYSTEM
    2.
    发明申请
    MODULAR PATIENT SUPPORT SYSTEM 有权
    模块化患者支持系统

    公开(公告)号:US20090085317A1

    公开(公告)日:2009-04-02

    申请号:US12244623

    申请日:2008-10-02

    IPC分类号: B62B5/04

    摘要: A patient support platform or mobile support cart is provided. The mobile support cart includes a transmission system that allows the patient and/or medical staff member to choose a stop, walk or roll mode. In the stop mode, the castor wheels are prevented from rolling across the floor by a braking mechanism. In the walking mode, the transmission causes a tracking wheel to engage the floor for providing tracked or guided motion to the mobile support cart. In a roll mode, the tracking wheel is raised and is disengaged from the floor, and the castor wheels are free to rotate. The platform is capable of supporting devices that may be attached or associated with a patient throughout their stay at a healthcare facility. The braking mechanism can include a cable and an associated brake arm, with the cable positioned to allow braking without inhibiting the ability of the castor wheel to swivel with respect to a castor mounting plate.

    摘要翻译: 提供患者支持平台或移动支持车。 移动支撑推车包括允许患者和/或医务人员选择停止,步行或滚动模式的传输系统。 在停止模式下,通过制动机构防止脚轮滚过地板。 在行走模式中,传动导致跟踪轮接合地板,以向移动支撑车提供跟踪或引导的运动。 在滚动模式中,跟踪轮升起并与地板分离,脚轮自由旋转。 该平台能够支持在医疗保健设施的整个逗留期间可能与患者连接或相关联的装置。 制动机构可以包括电缆和相关联的制动臂,其中电缆被定位成允许制动而不阻止脚轮相对于脚轮安装板旋转的能力。

    Point source assembly for thin film deposition devices and thin film deposition devices employing the same
    3.
    发明授权
    Point source assembly for thin film deposition devices and thin film deposition devices employing the same 失效
    用于薄膜沉积装置的点源装置和采用它的薄膜沉积装置

    公开(公告)号:US08778082B2

    公开(公告)日:2014-07-15

    申请号:US13134401

    申请日:2011-06-07

    申请人: Joseph D. LoBue

    发明人: Joseph D. LoBue

    IPC分类号: C23C16/00 C23C14/24

    CPC分类号: C23C14/243

    摘要: A point source assembly for a thin film deposition device having a chamber for holding a substrate, includes a crucible configured for holding and vaporizing a deposition material therein, where the crucible is configured for operative engagement to the chamber, an opening in the crucible configured for directing therefrom a vaporized form of the deposition material, where the opening includes a longitudinal line extending through the center of the crucible opening, and means operatively engaged to the crucible for facilitating rotational movement of the crucible for varying the orientation of the longitudinal line relative to the position of the substrate in the chamber.

    摘要翻译: 一种用于具有用于保持基底的腔室的薄膜沉积装置的点源组件,包括构造成用于在其中保持和蒸发沉积材料的坩埚,其中所述坩埚构造成用于与所述腔室的操作接合,所述坩埚中的开口被配置用于 引导沉积材料的汽化形式,其中开口包括延伸穿过坩埚开口的中心的纵向线,以及可操作地接合到坩埚的装置,以便于坩埚的旋转运动,以改变纵向线相对于 衬底在腔室中的位置。

    Modular patient support system
    5.
    发明授权
    Modular patient support system 有权
    模块化患者支持系统

    公开(公告)号:US08191909B2

    公开(公告)日:2012-06-05

    申请号:US12244623

    申请日:2008-10-02

    IPC分类号: B62B5/04

    摘要: A patient support platform or mobile support cart is provided. The mobile support cart includes a transmission system that allows the patient and/or medical staff member to choose a stop, walk or roll mode. In the stop mode, the castor wheels are prevented from rolling across the floor by a braking mechanism. In the walking mode, the transmission causes a tracking wheel to engage the floor for providing tracked or guided motion to the mobile support cart. In a roll mode, the tracking wheel is raised and is disengaged from the floor, and the castor wheels are free to rotate. The platform is capable of supporting devices that may be attached or associated with a patient throughout their stay at a healthcare facility. The braking mechanism can include a cable and an associated brake arm, with the cable positioned to allow braking without inhibiting the ability of the castor wheel to swivel with respect to a castor mounting plate.

    摘要翻译: 提供患者支持平台或移动支持车。 移动支撑推车包括允许患者和/或医务人员选择停止,步行或滚动模式的传输系统。 在停止模式下,通过制动机构防止脚轮滚过地板。 在行走模式中,传动导致跟踪轮接合地板,以向移动支撑车提供跟踪或引导的运动。 在滚动模式中,跟踪轮升起并与地板分离,脚轮自由旋转。 该平台能够支持在医疗保健设施的整个逗留期间可能与患者连接或相关联的装置。 制动机构可以包括电缆和相关联的制动臂,其中电缆被定位成允许制动而不阻止脚轮相对于脚轮安装板旋转的能力。

    Point source assembly for thin film deposition devices and thin film deposition devices employing the same
    6.
    发明申请
    Point source assembly for thin film deposition devices and thin film deposition devices employing the same 失效
    用于薄膜沉积装置的点源装置和采用它的薄膜沉积装置

    公开(公告)号:US20120312236A1

    公开(公告)日:2012-12-13

    申请号:US13134401

    申请日:2011-06-07

    申请人: Joseph D. LoBue

    发明人: Joseph D. LoBue

    IPC分类号: C23C16/448

    CPC分类号: C23C14/243

    摘要: A point source assembly for a thin film deposition device having a chamber for holding a substrate, includes a crucible configured for holding and vaporizing a deposition material therein, where the crucible is configured for operative engagement to the chamber, an opening in the crucible configured for directing therefrom a vaporized form of the deposition material, where the opening includes a longitudinal line extending through the center of the crucible opening, and means operatively engaged to the crucible for facilitating rotational movement of the crucible for varying the orientation of the longitudinal line relative to the position of the substrate in the chamber.

    摘要翻译: 一种用于具有用于保持基底的腔室的薄膜沉积装置的点源组件,包括构造成用于在其中保持和蒸发沉积材料的坩埚,其中所述坩埚构造成用于与所述腔室的操作接合,所述坩埚中的开口被配置用于 引导沉积材料的汽化形式,其中开口包括延伸穿过坩埚开口的中心的纵向线,以及可操作地接合到坩埚的装置,以便于坩埚的旋转运动,以改变纵向线相对于 衬底在腔室中的位置。

    Thin film crystallization device and method for making a polycrystalline composition
    7.
    发明申请
    Thin film crystallization device and method for making a polycrystalline composition 审中-公开
    薄膜结晶装置及其制造方法

    公开(公告)号:US20120190180A1

    公开(公告)日:2012-07-26

    申请号:US12931067

    申请日:2011-01-24

    摘要: A method for making a polycrystalline composition, wherein the method includes the steps of a) preparing a precursor material, b) heating the precursor material to a reaction temperature in the presence of a precursor vapor supplied from a source at a preselected partial pressure, for a sufficient time to initiate an interaction between the precursor material and the precursor vapor to form a heated precursor material, and c) cooling the heated precursor material at a predetermined cooling rate, optionally, in the presence of the precursor vapor supplied at a partial pressure, to yield the polycrystalline composition. A device for implementing the method of the present invention is also provided

    摘要翻译: 一种制备多晶组合物的方法,其中所述方法包括以下步骤:a)制备前体材料,b)在预选分压下从源提供的前体蒸气存在下,将前体材料加热到反应温度, 足够的时间来引发前体材料和前体蒸气之间的相互作用以形成加热的前体材料,以及c)以预定的冷却速率冷却被加热的前体材料,任选地,在分压下供应的前体蒸气 ,以产生多晶组合物。 还提供了一种用于实现本发明的方法的设备

    System and Method for Sealing a Vapor Deposition Source
    8.
    发明申请
    System and Method for Sealing a Vapor Deposition Source 有权
    密封气相沉积源的系统和方法

    公开(公告)号:US20110255950A1

    公开(公告)日:2011-10-20

    申请号:US12762024

    申请日:2010-04-16

    IPC分类号: H01L21/68 B05C11/00

    摘要: A system and method for movably sealing a vapor deposition source is described. One embodiment includes a system for coating a substrate, the system comprising a deposition chamber; a vapor pocket located within the deposition chamber; and an at least one movable seal, wherein the at least one movable seal is configured to form a first seal with a first portion of a substrate, and wherein the first seal is configured to prevent a vapor from leaking past the first portion of the substrate out of the vapor pocket. In some embodiments, the movable seal may comprise a first flange, wherein the first flange forms a wall of the vapor pocket; and a second flange, wherein the second flange is configured to be movably disposed within a first groove of the source block.

    摘要翻译: 描述了用于可移动地密封气相沉积源的系统和方法。 一个实施例包括用于涂覆基底的系统,该系统包括沉积室; 位于沉积室内的蒸汽袋; 以及至少一个可移动密封件,其中所述至少一个可移动密封件构造成与基底的第一部分形成第一密封件,并且其中所述第一密封件构造成防止蒸汽经过所述基底的所述第一部分泄漏 从蒸气口袋里出来。 在一些实施例中,可移动密封件可以包括第一凸缘,其中第一凸缘形成蒸气袋的壁; 和第二凸缘,其中所述第二凸缘被构造成可移动地设置在所述源块的第一凹槽内。